7 results
Non-contact Corona-Kelvin based Metrology for High-k Dielectric Characterization with an Extension to Micro-Scale Measurement
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 917 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0917-E09-01
- Print publication:
- 2006
-
- Article
- Export citation
Contamination Monitoring Using Surface Photovoltage and Application to Process Line Control
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 405
- Print publication:
- 1994
-
- Article
- Export citation
Monitoring Iron Contamination in Silicon by Surface Photovoltage and Correlation to Gate Oxide Integrity
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 299
- Print publication:
- 1993
-
- Article
- Export citation
Characterization of Surface Cleans by Surface Photovoltage and Surface Charge Imaging
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 339
- Print publication:
- 1993
-
- Article
- Export citation
The Effects of Iron Contamination on Thin Oxide Breakdown -Experimental and Modeling
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 993
- Print publication:
- 1992
-
- Article
- Export citation
Surface Charge Imaging in Semiconductor Wafers by Surface Photovoltage (SPV)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 261 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 223
- Print publication:
- 1992
-
- Article
- Export citation
Monitoring SIMOX Layer Properties and Implantation Temperature by Optical Measurements
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 133
- Print publication:
- 1987
-
- Article
- Export citation