High quality films of Ba2YCu3O7 have been made by coevaporation of Y, Cu, and BaF2 and subsequent annealing in oxygen. Addition of water vapor to the annealing gas at high temperatures has been found to greatly reduce the annealing time and, thus the substrate interaction. Transition temperatures (zero resistance) between 89–92 K are routinely obtained on SrTiO3 and cubic zirconia substrates. Critical current densities on SrTiO3 are as high as 106 A/cm2 at 81 K and routinely above 105 A/cm2 at 77 K. Transmission electron microscopy shows that on SrTiO3 the superconducting grains have an epitaxial orientation with respect to the substrate. Persistent current measurements in thin film rings demonstrate the absence of residual resistance in the superconducting state.