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Low-Temperature Polycrystalline Silicon Thin-Film Transist or Technologies for System-on-Glass Displays

Published online by Cambridge University Press:  31 January 2011

Shuichi Uchikoga
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Abstract

The elimination of conventional peripheral LSI (large-scale integration) drivers is considered essential to the development of future low-cost, energy-efficient, lightweight, and thin displays. System-on-glass (SOG) displays are a type of display with various functional circuits integrated on a glass substrate. Low-temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs) make the integration of circuits possible because they can be assembled into complex, high-current driver circuits. Furthermore, LTPS TFTs are attracting attention for driving organic light-emitting devices (OLEDs). This article introduces present and future LTPS TFT technologies for SOG displays.

Keywords

electronic materialsflat-panel displaysexcimer-laser annealingliquid-crystal displays (LCDs)organic light-emitting devices (OLEDs)polycrystalline siliconsystem-on-glass displaysthin films.
Type
Research Article
Information
MRS Bulletin , Volume 27 , Issue 11: Advanced Flat-Panel Displays and Materials , November 2002 , pp. 881 - 886
Copyright
Copyright © Materials Research Society 2002

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References

1.Higuchi, T., Hanari, J., Nakamura, N., Mametsuka, K., Watanabe, M., Murai, T., Watanabe, R., Seiki, M., Azuma, R., Hori, Y., Nakamura, K., Aoki, Y., Sakurai, H., Nakazono, T., and Harada, N., in SID Int. Symp. Digest of Tech. Papers 31 (Society for Information Display, San Jose, 2000) p. 1121.Google Scholar
2.Kanzaki, K., in Int. Workshop on Active-Matrix Liquid-Crystal Displays/2001 Digest of Tech. Papers (Japan Society of Applied Physics, Tokyo, 2001) p. 71.Google Scholar
3.Hanazawa, Y., Hirai, H., Kumagai, K., Goshoo, K., and Nakamura, N., in Proc. Eurodisplay '99 (Society for Information Display, San Jose, 2001) p. 369.Google Scholar
4.Hara, A. and Sasaki, N., in IEEE Int. Electron Devices Meet. Tech. Dig. 1999, Vol. 943 (Institute of Electrical and Electronics Engineers, Piscat-away, NJ, 1999) p. 301.Google Scholar
5.Matsumura, M., in Proc. Eurodisplay '99 (Society for Information Display, San Jose, 1999) p. 351.Google Scholar
6.Im, J.S., Crowder, M.A., Sposili, R.S., Leonard, J.P., Kim, H.J., Yoon, J.H., Gupta, V.V., and Cho, H.S., Phys. Status Solidi A 166 (1998) p. 603.3.0.CO;2-0>CrossRefGoogle Scholar
7.Helen, Y., Dassow, R., Nerding, M., Mourgues, K., Raoult, F., Kohler, J.R., Mohammed-Brahim, T., Rogel, R., Bonnaud, O., Werner, J.H., and Strunk, H.P., Thin Solid Films 383 (2001) p. 143.CrossRefGoogle Scholar
8.Fujimura, T., Takami, A., Ishida, A., Kawamura, S., and Nishibe, T., in Int. Workshop on Active-Matrix Liquid-Crystal Displays/2001 Digest of Tech. Papers (Japan Society of Applied Physics, Tokyo, 2001) p. 175.Google Scholar
9.Goto, M., Sakai, M., Shibuya, M., and Nishitani, M., in Int. Workshop on Active-Matrix Liquid-Crystal Displays/1999 Digest of Tech. Papers (Japan Society of Applied Physics, Tokyo, 1999) p. 143.Google Scholar
10.Takami, A., Ishida, A., Tsutsumi, J., Nishibe, T., and Ibaraki, N., in Int. Workshop on Active-Matrix Liquid-Crystal Displays/2000 Digest of Tech. Papers (Japan Society of Applied Physics, Tokyo, 2000) p. 45.Google Scholar
11.Tanaka, J., Saito, H., Yoshizawa, T., Okamoto, T., Yamauchi, T., and Nishimura, Y., in Int. Workshop on Active-Matrix Liquid-Crystal Displays/1999 Digest of Tech. Papers (Japan Society of Applied Physics, Tokyo, 1999) p. 261.Google Scholar
12.Yamamoto, M., Nishitani, H., Sakai, M., Gotoh, M., Taketomi, Y., Tsutsu, H., and Nishitani, M., in Proc. Eurodisplay ′99 (Society for Information Display, San Jose, 1999) p. 53.Google Scholar
13.Saito, Y., Sekine, K., Ueda, N., Hirayama, M., Sugawa, S., and Ohmi, T., in VLSI Int. Symp. Digest of Tech. Papers (Institute of Electrical and Electronics Engineers, Piscataway, N.J., 2000) p. 176.Google Scholar
14.Ibaraki, N., in SID Int. Symp. Digest of Tech. Papers 30 (Society for Information Display, San Jose, 1999) p. 172.Google Scholar
15.Mishima, Y., Takei, M., Ogata, K., Uematsu, T., Yoshino, K., Takeuchi, F., and Sakai, N., in Proc. Eurodisplay ′99 (Society for Information Display, San Jose, 1999) p. 49.Google Scholar
16.Suzuki, K., Tada, M., Yamaji, Y., and Ishizuka, Y., in Int. Workshop on Active-Matrix Liquid-Crystal Displays/1999 Digest of Tech. Papers (Japan Society of Applied Physics, Tokyo, 1999) p. 5.Google Scholar
17.Kimura, H., Maeda, T., Tsunashima, T., Moriyama, N., Morita, T., and Sato, H., in SID Int. Symp. Digest of Tech. Papers 32 (Society for Information Display, San Jose, 2001) p. 268.Google Scholar
18.Kamiura, N., Mametsuka, K., Hanari, J., Yamamoto, K., Sakurai, H., Hirayama, H., Kobayashi, M., and Nakazono, N., in Proc. 21st Int. Display Research Conf./8th Int. Display Workshop (Society for Information Display, San Jose, 2001) p. 1403.Google Scholar