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Measurement of Point-Spread Function of IP-System

Published online by Cambridge University Press:  02 July 2020

T. Oikawa ,
F. Hosokawa ,
A. Taniyama ,
D. Shindo  and
M. Kersker
T. Oikawa
Affiliation:
JEOL Ltd., Akishima, Tokyo, 196, Japan
F. Hosokawa
Affiliation:
JEOL Ltd., Akishima, Tokyo, 196, Japan
A. Taniyama
Affiliation:
Institute for Advanced Materials Processing, Tohoku Univ., Katahira, Sendai980-77, Japan
D. Shindo
Affiliation:
Institute for Advanced Materials Processing, Tohoku Univ., Katahira, Sendai980-77, Japan
M. Kersker
Affiliation:
JEOL U.S.A. INC., 11 Dearborn Road, Peabody, MA, 01960
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Extract

For the resolution estimation of the Imaging Plate (IP)-system, several methods were carried out. One of them is the measurement of the modulation transfer function (MTF) from the phase contrast transfer function taken with an amorphous Ge film specimen. One of another is the measurement of the point-spread function (PSF) from the auto-correlation of the Poison noise obtained by the IP-system.

In this experiment, the PSF of the IP-system were measured from the intensity distribution recorded with a 1.6 μm-diameter electron probe on the IP.

When recording the electron intensity with a small enough electron probe as compared with the pixel size of the IP (25 μm × 25 μm), a single pixel detects the electron signal in case of ideal IP-resolution which is limited only by the pixel size. However, practical IP-resolution is limited by the electron diffusion, x-ray emission and the laser beam diffusion in the IP, and so on. Therefore, it is possible to measure the PSF from the intensity distributions of the patterns recorded with a small enough electron probe.

Type
Digital Microscopy–What are its Limits?
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 1103 - 1104
Copyright
Copyright © Microscopy Society of America 1997

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References

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