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Elucidation of the growth mechanism of MoS2 during the CVD process

Published online by Cambridge University Press:  26 December 2018

Sajeevi S Withanage ,
Mike Lopez ,
Wasee Sameen ,
Vanessa Charles  and
Saiful I Khondaker
Sajeevi S Withanage*
Affiliation:
Department of Physics, University of Central Florida, Orlando, FL32816, United States NanoScience Technology Center, University of Central Florida, Orlando, FL32816, United States
Mike Lopez
Affiliation:
NanoScience Technology Center, University of Central Florida, Orlando, FL32816, United States
Wasee Sameen
Affiliation:
NanoScience Technology Center, University of Central Florida, Orlando, FL32816, United States
Vanessa Charles
Affiliation:
NanoScience Technology Center, University of Central Florida, Orlando, FL32816, United States
Saiful I Khondaker
Affiliation:
Department of Physics, University of Central Florida, Orlando, FL32816, United States NanoScience Technology Center, University of Central Florida, Orlando, FL32816, United States Department of Electrical & Computer Engineering, University of Central Florida, Orlando, FL32816, United States
*
*(Email: sajeevi@knights.ucf.edu)
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Abstract

Chemical vapor deposition (CVD) growth of two-dimensional molybdenum disulfide (MoS2) using molybdenum trioxide (MoO3) and sulfur (S) powder often results in intermediate molybdenum oxy-sulfide (MoOS2) species along with MoS2 due to a lack of control over the vapor pressure required for the clean growth. Much effort has been devoted in understanding and controlling of these intermediate MoOS2 specifies. Here, we show that with a second step sulfurization at moderate temperatures, these MoOS2 crystals can be transformed to monolayer MoS2 crystals. Scanning electron microscopy, Raman and photoluminescence spectroscopy and atomic force microscopy characterization carried out before and after re-sulfurization confirm the monolayer MoS2 growth via this route. This study shows that MoOS2 formed at the intermediate state can be successfully recycled to MoS2.

Keywords

2D materialschemical vapor deposition (CVD) (deposition)
Type
Articles
Information
MRS Advances , Volume 4 , Issue 10: Electronic, Photonic and Magnetic Materials , 2019 , pp. 581 - 586
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Copyright
Copyright © Materials Research Society 2018 

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