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Showerhead-Assisted Chemical Vapor Deposition of Perovskite Films for Solar Cell Application

Published online by Cambridge University Press:  24 February 2020

S. Sanders ,
D. Stümmler ,
J. D. Gerber ,
J. H. Seidel ,
G. Simkus ,
M. Heuken ,
A. Vescan  and
H. Kalisch
S. Sanders*
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany
D. Stümmler
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany
J. D. Gerber
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany
J. H. Seidel
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany
G. Simkus
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany AIXTRON SE, Dornkaulstr. 2, 52134 Herzogenrath, Germany
M. Heuken
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany AIXTRON SE, Dornkaulstr. 2, 52134 Herzogenrath, Germany
A. Vescan
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany
H. Kalisch
Affiliation:
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstr. 18, 52074 Aachen, Germany
*
*(Email: sanders@cst.rwth-aachen.de)
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Abstract

In the last years, perovskite solar cells have attracted great interest in photovoltaic (PV) research due to their possibility to become a highly efficient and low-cost alternative to silicon solar cells. Cells based on the widely used Pb-containing perovskites have reached power conversion efficiencies (PCE) of more than 20 %. One of the major hurdles for the rapid commercialization of perovskite photovoltaics is the lack of deposition tools and processes for large areas. Chemical vapor deposition (CVD) is an appealing technique because it is scalable and furthermore features superior process control and reproducibility in depositing high-purity films. In this work, we present a novel showerhead-based CVD tool to fabricate perovskite films by simultaneous delivery of precursors from the gas phase. We highlight the control of the perovskite film composition and properties by adjusting the individual precursor deposition rates. Providing the optimal supply of precursors results in stoichiometric perovskite films without any detectable residues.

Keywords

chemical vapor deposition (CVD) (deposition)perovskitesoptical propertiesmorphologyphotovoltaic
Type
Articles
Information
MRS Advances , Volume 5 , Issue 8-9: Energy and Environment , 2020 , pp. 385 - 393
Copyright
Copyright © Materials Research Society 2020

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