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Abstract
Aluminum titanium nitride (AlxTi1-xN, 0
Supplementary materials
Title
Supportin ginfo
Description
More characterization details
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On the reliability of Vegard’s law in compositional analysis of chemical vapor deposited AlxTi1-xN
26 September 2025, Version 1
Working Paper
This content is an early or alternative research output and has not been peer-reviewed by Cambridge University Press at the time of posting.
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Version History
Sep 26, 2025 Version 1
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Funding
Seco Tools
Swedish Government Strategic Research Area in Materials Science on Advanced Functional Materials at Linköping University
Faculty Grant SFO-Mat-LiU No. 2009-00971
EPSRC National Facility for XPS
HarwellXPS”, EP/Y023587/1, EP/Y023609/1, EP/Y023536/1, EP/Y023552/1 and EP/Y023544/1
Henry Royce Institute for Advanced Materials, funded through EPSRC grants
EP/R00661X/1, EP/S019367/1, EP/P025021/1 and EP/P025498/1
Swedish Research Council
VR-2021-04113
Åforsk foundation
22-150
Author’s competing interest statement
The author(s) have declared they have no conflict of interest with regard
to this content
Ethics
The author(s) have declared ethics committee/IRB approval is not relevant
to this content