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Enhanced Range of Measurable Thickness of Thin Crystalline Layers Using θ/2θ Decoupled Powder X-ray Diffraction

Published online by Cambridge University Press:  06 March 2019

G. Kimmel  and
W. Kaplan
G. Kimmel
Affiliation:
Dept. of Materials Engineering Technion - Israel Institute of Technology Haifa, 32000 ISRAEL
W. Kaplan
Affiliation:
Dept. of Materials Engineering Technion - Israel Institute of Technology Haifa, 32000 ISRAEL
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Extract

X-ray diffraction is one of the most useful methods for the characterisation of thin crystalline layers or coatings. The most interesting techniques are: the identification of phases and their relative quantities, texture analysis, and residual stress measurements.

Thin layers which are transparent to the x-ray beam (in the diffracted wavelength) yield different intensities as compared with a bulk sample.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 121 - 127
Copyright
Copyright © International Centre for Diffraction Data 1989

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References

1. Hejdov, H. and Cermak, M., “A New X-ray Diffraction Method for Thin Films Thickness Estimation”, Phys. Stat. Sol. 72:K95–K98 (1982).Google Scholar
2. Brandt, C. G. and van der Vliet, G. H., “Quantitative Analysis of Thin Samples by X-ray Diffraction”, Adv. X-ray Anal. 29:203–209 (1985).Google Scholar
3. Kimmel, G., Shafirstien, G., and Bamberger, M., “Fast Thickness Measurement of Thin Crystalline Layers By Relative Intensities XRPD Method, Adv. X-Ray Anal., 32:293–301 (1988).Google Scholar
4. Schreiner, W. N., Kimmel, G., “Observed and Calculated XRPD Intensities for Single Substance Specimens,” Adv. X-Ray Anal., 30:351–356 (1986).Google Scholar