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New transparent conductors anatase Ti1−xMxO2 (M=Nb,Ta): transport and optical properties
Published online by Cambridge University Press: 26 February 2011
Abstract
We have discovered new transparent conducting oxides (TCOs), anatase Ti1-xMxO2 (M=Nb,Ta), in thin film form. Both films with 0.03 ≤ × ≤ 0.06 showed resistivity of 2−3 × 10−4 Ωcm and internal transmittance of ∼95% in the visible light region (40 nm in thickness), at room temperature. These values are comparable to those of typical TCOs, such as In2−xSnxO3 (ITO).
- Type
- Research Article
- Information
- MRS Online Proceedings Library (OPL) , Volume 905: Symposium DD – Materials for Transparent Electronics , 2005 , 0905-DD02-01
- Copyright
- Copyright © Materials Research Society 2006