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Comment on “The diffusion of antimony in heavily doped and (sic) n- and p-type silicon” [J. Mater. Res. 1, 705 (1986)]

Published online by Cambridge University Press:  31 January 2011

F. F. Morehead
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
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Abstract

R. B. Fair et al. have analyzed original data on the effect of heavy, uniform background doping with As and B on the diffusivity of Sb in Si at 1000°–1200°C. Their analysis attributed a role to “electric fields” and led to the conclusion that, for n-type background doping, Sb diffusion is dominated by double-negatively charged vacancies with no contribution from V. For p-type backgrounds they concluded that donor-acceptor pairing alone retards the diffusion. Here it is shown (1) that electric fields do not play a role in their experiments, (2) that the contribution of V to Sb diffusion in an n-type background is not zero but is roughly equal to that of V= for n/ni = 10, and (3) that the retardation of Sb diffusion in p-type Si is due both to donor-acceptor pairing and, principally, to the elimination of the contributions of V and V=.

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Comments
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

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