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Effects of substrate pretreatment and methane fraction on the optical transparency of nanocrystalline diamond thin films

Published online by Cambridge University Press:  31 January 2011

D. M. Bhusari ,
J. R. Yang ,
T. Y. Wang ,
K. H. Chen ,
S. T. Lin  and
L. C. Chen
D. M. Bhusari
Affiliation:
Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan
J. R. Yang
Affiliation:
Department of Mechanical Engineering, National Taiwan Institute of Technology, Taipei, Taiwan
T. Y. Wang
Affiliation:
Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan
K. H. Chen
Affiliation:
Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan
S. T. Lin
Affiliation:
Department of Mechanical Engineering, National Taiwan Institute of Technology, Taipei, Taiwan
L. C. Chen
Affiliation:
Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan
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Extract

Optical transmittance of the nanocrystalline diamond films has been studied as a function of grain size of the diamond powder used for substrate pretreatment and the methane fraction in the source gas. It has been observed that for CH4 fractions below 13%, the films grown on substrates pretreated with finer diamond powder are more transparent, while this trend reverses for CH4 fractions above 13%. These variations in the transparency of the films correlate very well with their corresponding surface roughness. Nanocrystalline/amorphous diamond films with transmittance of greater than 80% beyond 700 nm and with average surface roughness as low as 61 Å have been obtained for CH4 fractions as high as 42% in the source gas. Interestingly, these films do not show an obvious presence of any graphitic carbon, and the structural ordering of the amorphous sp3-bonded phase also seems to be insensitive to the CH4 content of the source gas.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 7 , July 1998 , pp. 1769 - 1773
Copyright
Copyright © Materials Research Society 1998

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