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Highly Ordered Nanoporous Alumina Films: Effect of Pore Size and Uniformity on Sensing Performance

Published online by Cambridge University Press:  31 January 2011

Oomman K. arghese ,
Dawei Gong ,
Maggie Paulose ,
Keat G. Ong ,
Craig A. Grimes  and
Elizabeth C. Dickey
Oomman K. arghese
Affiliation:
Department of Materials Science & Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802
Dawei Gong
Affiliation:
Department of Electrical Engineering & Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802
Maggie Paulose
Affiliation:
Department of Electrical Engineering & Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802
Keat G. Ong
Affiliation:
Department of Electrical Engineering & Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802
Craig A. Grimes
Affiliation:
Department of Electrical Engineering & Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802
Elizabeth C. Dickey
Affiliation:
Department of Materials Science & Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802
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Extract

The effect of pore size and uniformity on the humidity response of nanoporous alumina, formed on aluminum thick films through an anodization process, is reported. Pore sizes examined range from approximately 13 to 45 nm, with a pore size standard deviations ranging from 2.6 to 7.8 nm. The response of the material to humidity is a strong function of pore size and operating frequency. At 5 kHz an alumina sensor with an average pore size of 13.6 nm (standard deviation 2.6 nm) exhibits a well-behaved change in impedance magnitude of 103 over 20% to 90% relative humidity. Increasing pore size decreases the humidity range over which the sensors have high sensitivity and shifts the operating range to higher humidity values. Cole–Cole plots of 5 to 13 MHz measured impedance spectra, modeled using equivalent circuits, are used to resolve the effects of water adsorption and ion migration within the adsorbed water layer. The presence of impurity ions within the highly ordered nano-dimensional pores, accumulated during the anodization process, appear highly beneficial for obtaining a substantial variation in measured impedance over a wide range of humidity values.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 5 , May 2002 , pp. 1162 - 1171
Copyright
Copyright © Materials Research Society 2002

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