Skip to main content
    • Aa
    • Aa

Laser-Induced Growth of Titanium Nitride Microcolumns on Biased Titanium Targets

  • E. György (a1), A. Pérez del Pino (a1), P. Serra (a1) and J.L. Morenza (a1)

Titanium targets with a bias voltage ranging from −500 to +500 V were submitted to multipulse high repetition rate Nd:yttrium aluminum garnet (YAG; λ = 1.064 μm, τ ∼ 300 ns, ν = 30 kHz) laser irradiations in nitrogen at intensity values below the single-pulse melting threshold. The morphology of the TiN structures formed under the cumulative action of the laser pulses on the surface of the unbiased and biased targets was investigated by profilometry and scanning electron microscopy. Under these irradiation conditions, a specific columnar surface microrelief developed. The height of the microcolumns reached about 10–15 μm, and their diameter about 1–2 μm. The development of TiN microcolumns was enhanced by the applied bias voltage. The enhancement in the negative biased samples was stronger than that in the positive biased ones.

Corresponding author
b)Address all correspondence to this author. e-mail:
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1 D. Bauerle In Laser Processing and Chemistry (Springer-Verlag, Berlin, Germany, 2000).

3 E. György , A. Pérez del Pino , P. Serra and J.L. Morenza : Influence of the ambient gas in laser structuring of the titanium surface. Surf. Coat. Technol. 187, 245 (2004).

4 S.I. Dolgaev , S.V. Lavrishev , A.A. Lyalin , A.V. Simakin , V.V. Votonov and G.A. Shafeev : Formation of conical microstructures upon laser evaporation of solids. Appl. Phys. A: Mater. Sci. Proc. 73, 177 (2001).

5 Y. Kawakami and E. Ozawa : Tungsten microcone arrays grown using nanosecond pulsed Nd:YAG laser in a low-pressure He-gas atmosphere. Appl. Phys. A: Mater. Sci. Proc. 74, 59 (2002).

6 F. Sanchez , J.L. Morenza and V. Trtik : Characterization of the progressive growth of columns by excimer laser irradiation of silicon. Appl. Phys. Lett. 75, 3303 (1999).

7 A.J. Pedraza , J.D. Fowlkes and D.H. Lowndes : Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation. Appl. Phys. Lett. 74, 2322 (1999).

9 A. Wennerberg , A. Hallgren , C. Johansson and S. Danelli : A histomorphometric evaluation of screw-shaped implants each prepared with two surface roughnesses. Clin. Oral Impl. Res. 9, 11 (1998).

10 M. Nakamoto and K. Fukuda : Field electron emission from LaB6 and TiN emitter arrays fabricated by transfer mold technique. Appl. Surf. Sci. 202, 289 (2002).

11 E. György , I.N. Mihailescu , P. Serra , A. Pérez del Pino and J.L. Morenza : Single-pulse Nd:YAG laser irradiation of titanium: Influence of laser intensity on surface morphology. Surf. Coat. Technol. 154, 63 (2002).

12 A.I. Nwobu , R.D. Rawlings and D.R.F. West : Nitride formation in titanium based substrates during laser surface melting in nitrogen-argon atmospheres. Acta Mater. 47, 631 (1999).

13 P.R. Willmott and J.R. Huber : Pulsed laser vaporization and deposition. Rev. Mod. Phys. 72, 315 (2000).

14 L.K. Ang , Y.T. Lau , R.M. Gilgenbach and H.L. Spindler : Analysis of laser absorption on a rough metal surface. Appl. Phys. Lett. 70, 696 (1997).

16 A.B. Brailovsky , S.V. Gaponov and V.I. Luchin : Mechanisms of melt droplets and solid-particles ejection from a target surface by pulsed laser action. Appl. Phys. A: Mater. Sci. Proc. 61, 81 (1995).

17 M. Wautelet and L.D. Laude : Cohesion of solids under laser irradiation. Appl. Phys. Lett. 36, 197 (1980).

18 J.M.E. Harper , J.J. Cuomo and H.T.G. Hentzell : Synthesis of coumpund thin films by dual ion beam deposition. I. Experimental approach. J. Appl. Phys. 58, 550 (1985).

19 B.W. Han , H.S. Lee and B.T. Ahn : Field-emission characteristics of CoSi2/TiN-coated silicon emitter tips. Appl. Surf. Sci. 187, 45 (2002).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *



Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 30 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 30th May 2017. This data will be updated every 24 hours.