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A low-temperature and low-cost method to produce high-quality epitaxial anatase TiO2 thin films

Published online by Cambridge University Press:  03 March 2011

Zhaoming Zhang
Zhaoming Zhang*
Affiliation:
Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW 2234, Australia
*
a) Address all correspondence to this author. e-mail: zzx@ansto.gov.au
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Abstract

Epitaxial anatase TiO2 thin films were successfully grown on lattice-matched SrTiO3 (001) substrates by a novel hydrothermal method at very low temperatures (120–200 °C). This method is extremely simple and inexpensive in that the SrTiO3 substrate itself provides the source material for the TiO2 film. X-ray diffraction confirmed the high crystallinity and phase purity of the anatase films. The epitaxial relationship between the film and the substrate was determined as (001)[100]anatase // (001)[100]SrTiO3. Atomic force microscopy revealed the average size of the anatase crystallites as approximately 50 to 200 nm.

Keywords

Crystal growthEpitaxyThin film
Type
Rapid Communications
Information
Journal of Materials Research , Volume 20 , Issue 2 , February 2005 , pp. 292 - 294
Copyright
Copyright © Materials Research Society 2005

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