Hostname: page-component-76fb5796d-22dnz Total loading time: 0 Render date: 2024-04-29T10:22:11.224Z Has data issue: false hasContentIssue false
  • English
  • Français

Sintering kinetics of silica-titania sol-gel films on silicon wafers

Published online by Cambridge University Press:  31 January 2011

Xin Min Du  and
Rui M. Almeida
Xin Min Du
Affiliation:
INESC (IST), R. Alves Redol, 9-3°, 1000 Lisboa, Portugal
Rui M. Almeida
Affiliation:
INESC (IST), R. Alves Redol, 9-3°, 1000 Lisboa, Portugal
Get access

Abstract

The sintering behavior of 80SiO2–20TiO2 sol-gel thin films on Si wafers, prepared by spin coating, was studied by the calculation of density as a function of temperature, from refractive index measurements and the Lorenz–Lorentz relationship. The sintering kinetics of the films were fit to the Mackenzie and Shuttleworth model, over the temperature range of 700 °C–850 °C. Using this model, the viscosity was determined as a function of temperature. These gel films sintered to full density at 850 °C.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 2 , February 1996 , pp. 353 - 357
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Mackenzie, J. K. and Shuttleworth, R., Proc. Phys. Soc. (London) 62, 838 (1949).CrossRefGoogle Scholar
2.Scherer, G. W., J. Am. Ceram. Soc. 60, 236 (1977).CrossRefGoogle Scholar
3.Sacks, M. D. and Tseng, T., J. Am. Ceram. Soc. 67, 532 (1984).CrossRefGoogle Scholar
4.Lukosc, W. and Tiefenhaler, K. T., Opt. Lett. 8, 537 (1983).CrossRefGoogle Scholar
5.Brinker, J. and Harrington, M. S., Solar Energy Materials 5, 159 (1981).CrossRefGoogle Scholar
6.Barbier, D., Orignac, X., Du, X. M., and Almeida, R. M., in 8th Cimtec, World Ceramics Congress, Florence, Italy (June, 1994).Google Scholar
7.Brinker, C. J. and Scherer, G. W., Sol-gel Science (Academic Press, Inc., New York, 1990), p. 681.Google Scholar
8.Scherer, G. W. and Garino, T., J. Am. Ceram. Soc. 68, 216 (1985).CrossRefGoogle Scholar
9.Brinker, C. J. and Mukherjee, S. P., Thin Solid Films 77, 141 (1981).CrossRefGoogle Scholar
10.Bel Hadj, F., Sempere, R., and Phallipou, J., J. Non-Cryst. Solids 82, 417 (1986).CrossRefGoogle Scholar
11.Almeida, R. M., Vasconcelos, H. C., and Ilharco, L. M., in Sol-Gel Optics III, edited by Mackenzie, J.D. (Proc. SPIE 2288, San Diego, CA, 1994), p. 678.CrossRefGoogle Scholar
12.Yoldas, B. E., J. Non-Cryst. Solids 38–39, 81 (1980).CrossRefGoogle Scholar
13.Yeatman, E. M., Green, M., Dawnay, E.J.C., Fardad, M.A., and Horowitz, F., J. Sol-Gel Sci. Technol. 2, 711 (1994).CrossRefGoogle Scholar
14.Dislich, H., Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics and Specialty Shapes, edited by Klein, L. C. (Noyes Publications, 1988), p. 50.Google Scholar
15.Frenkel, J., J. Phys. (Moscow) 9, 385 (1945).Google Scholar
16.Schultz, P. C., J. Am. Ceram. Soc. 59, 214 (1976).CrossRefGoogle Scholar
17.Gulati, S. T., in Optical Waveguide Materials, edited by Broer, M. M., Sigel, G. H. Jr., Kersten, R.Th., and Kawazoe, H. (Mater. Res. Soc. Symp. Proc. 244, Pittsburgh, PA, 1992), p. 67.Google Scholar
18.Cheng, Y. C. and Hench, L. L., in Better Ceramics Through Chemistry III, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mater. Res. Soc. Symp. Proc. 121, Pittsburgh, PA, 1988), p. 593.Google Scholar
19.Bornside, D. E., Macosko, C. W., and Scriven, L. E., J. Imaging Tech. 13, 122 (1987).Google Scholar
20.Brinker, C. J., Drotning, W. D., and Scherer, G. W., in Better Ceramics Through Chemistry, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mater. Res. Soc. Symp. Proc. 32, Elsevier Science Publishing, New York, 1984), p. 25.Google Scholar
21.Scholz, H., Glass (Springer-Verlag, New York, 1991), p. 322.CrossRefGoogle Scholar
22.Vasconcelos, H. C., private communication.Google Scholar
23.Dawnay, E.J.C., Fardad, M. A., Green, M., Horowitz, F., Yeatman, E.M., Almeida, R. M., Vasconcelos, H. C., Guglielmi, M., and Martucci, A., in 8th Cimtec, World Ceramics Congress, Florence, Italy (June, 1994).Google Scholar
24.Paul, A., Chemistry of Glass (Chapman and Hall, London, 1982), p. 82.CrossRefGoogle Scholar