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Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition

Published online by Cambridge University Press:  31 January 2011

Shen Zhu ,
C-H. Su ,
S. L. Lehoczky ,
M. A. George  and
D. H. Lowndes
Shen Zhu
Affiliation:
Universities Space Research Association, NASA/Marshall Space Flight Center, Huntsville, Alabama 35812
C-H. Su
Affiliation:
Microgravity Science and Applications Department, NASA/Marshall Space Flight Center, Huntsville, Alabama 35812
S. L. Lehoczky
Affiliation:
Microgravity Science and Applications Department, NASA/Marshall Space Flight Center, Huntsville, Alabama 35812
M. A. George
Affiliation:
Department of Chemistry, The University of Alabama, Huntsville, Alabama 35899
D. H. Lowndes
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831–6056
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Abstract

Morphology and structure of ZnO films deposited on (0001) sapphire and glass substrates by off-axis sputtering were investigated at various temperatures and pressures. All films show highly textured structures on glass substrates and epitaxial growth on sapphire substrates. The full width at half-maximum of theta rocking curves for epitaxial films is less than 0.5°. In textured films, it rises to several degrees. The trend of surface textures in films grown at low pressures is similar to those grown at high temperatures. A morphology transition from large well-defined hexagonal grains to flat surface was observed at a pressure of 50 mtorr and temperature of 550 °C. The experiment results are explained by the transport behavior of depositing species.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 5 , May 2000 , pp. 1125 - 1130
Copyright
Copyright © Materials Research Society 2000

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