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    Matienzo, L. J. and Egitto, F. D. 2007. Poly(dimethylsiloxane)-polyimide blends in the formation of thick polyimide films. Journal of Materials Science, Vol. 42, Issue. 1, p. 239.

    Egitto, F. D. and Matienzo, L. J. 2006. Transformation of Poly(dimethylsiloxane) into thin surface films of SiO x by UV/Ozone treatment. Part I: Factors affecting modification. Journal of Materials Science, Vol. 41, Issue. 19, p. 6362.

    Matienzo, L. J. and Egitto, F. D. 2006. Transformation of poly(dimethylsiloxane) into thin surface films of SiO x by UV/ozone treatment. Part II: segregation and modification of doped polymer blends. Journal of Materials Science, Vol. 41, Issue. 19, p. 6374.

    Composto, Russell J. Walters, Russel M. and Genzer, Jan 2002. Application of ion scattering techniques to characterize polymer surfaces and interfaces. Materials Science and Engineering: R: Reports, Vol. 38, Issue. 3-4, p. 107.

    Arkles, Barry 2001. Commercial Applications of Sol-Gel-Derived Hybrid Materials. MRS Bulletin, Vol. 26, Issue. 05, p. 402.


Ultraviolet laser-induced formation of thin silicon oxide film from the precursor β-chloroethyl silsesquioxane

  • Jaya Sharma (a1), Donald H. Berry (a1), Russell J. Composto (a1) and Hai-Lung Dai (a1)
  • DOI:
  • Published online: 01 January 2011

Formation of silicon oxide thin films from spin-coated β-chloroethyl silsesquioxane (β-cesq) on silicon, NaCl, and quartz was induced by 193 nm laser pulses. The silicon oxide deposition is characterized by ir, uv, ellipsometry, and Rutherford backscattering spectrometry. The silicon oxide films obtained by uv irradiation were found to have much less carbon and chlorine as impurities and have a higher refractive index as compared to those obtained by annealing. The photoinduced oxide films were found to be smooth, without laser-induced microrough or periodic structures.

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Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
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