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Ultraviolet patterning of KTiOPO4 thin films through metallo-organics

Published online by Cambridge University Press:  26 July 2012

Ken-ichi Noda ,
Wataru Sakamoto ,
Toshinobu Yogo  and
Shin-ichi Hirano
Ken-ichi Noda
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Wataru Sakamoto
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Toshinobu Yogo
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Shin-ichi Hirano
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Extract

Patterned KTiOPO4 (KTP) films were successfully synthesized through metallo-organics using ultraviolet (uv) patterning. A homogeneous precursor solution was prepared by the reaction control of (nBuO)2P(O) (OH), Ti(OEt)4, and KOEt in ethanol. The solubility of the KTP precursor films in ethanol changed with uv irradiation because of the polymerization of KTP precursor. The patterned KTP precursor films crystallized to single-phase KTP after heat treatment at 600 °C for 2 h. The patterned films were found to be exactly stoichiometric KTP.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 1 , January 1999 , pp. 222 - 227
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

1.Bierlein, J. D. and Vanherzeele, H., J. Opt. Soc. Am. B 6 (4), 622 (1989).CrossRefGoogle Scholar
2.Cheng, L.K. and Bierlein, J.D., Ferroelectrics 142, 209 (1993).CrossRefGoogle Scholar
3.Hagerman, M. E. and Poeppelmeier, K. R., Chem. Mater. 7 (4), 602 (1995).CrossRefGoogle Scholar
4.Li, L. and Burke, J. J., Opt. Lett. 17 (17), 1195 (1992).CrossRefGoogle Scholar
5.Roelofs, M.G., Suna, A., Bindloss, W., and Bierlein, J. D., J. Appl. Phys. 76 (9), 4999 (1994).CrossRefGoogle Scholar
6.Eger, D., Oron, M., and Katz, M., J. Appl. Phys. 74 (7), 4298 (1993).CrossRefGoogle Scholar
7.Eger, D., Oron, M., Katz, M., and Zussman, A., Appl. Phys. Lett. 64 (24), 3208 (1994).CrossRefGoogle Scholar
8.Bierlein, J. D., Ferretti, A., Brixner, L. H., and Hsu, W.Y., Appl. Phys. Lett. 50 (18), 1216 (1987).CrossRefGoogle Scholar
9.Chiu, Y., Stancil, D.D., and Schlesinger, T. E., J. Appl. Phys. 80 (7), 3662 (1996).CrossRefGoogle Scholar
10.Chiu, Y., Stancil, D.D., Schlesinger, T. E., and Risk, W. P., Appl. Phys. Lett. 69 (21), 3134 (1996).CrossRefGoogle Scholar
11.Hirano, S., Yogo, T., Kikuta, K., Noda, K., Ichida, M., and Nakamura, A., J. Am. Ceram. Soc. 78 (11), 2956 (1995).CrossRefGoogle Scholar
12.Noda, K., Sakamoto, W., Kikuta, K., Yogo, T., and Hirano, S., Chem. Mater. 9 (10), 2174 (1997).CrossRefGoogle Scholar
13.Harmer, M.A. and Roelofs, M. G., J. Mater. Sci. Lett. 12, 489 (1993).CrossRefGoogle Scholar
14.Barbé, C.J., Harmer, M. A., and Scherer, G.W., J. Am. Ceram. Soc. 78 (8), 2033 (1995).CrossRefGoogle Scholar
15.Xiong, F., Hageman, M., Zhou, H., Kozhevnikov, V., Wong, G.K., Poeppelmeier, K., Ketterson, J. B., Chang, R. P. H., and White, C. W., J. Vac. Sci. Technol. A 12 (4), 1446 (1994).CrossRefGoogle Scholar
16.Liu, Z.G., Liu, J. M., Ming, N. B., Wang, J.Y., Liu, Y. G., and Jiang, M. H., J. Appl. Phys. 76 (12), 8215 (1994).CrossRefGoogle Scholar
17.Chang, L.K., Bierlein, J. D., and Foris, C. M., J. Cryst. Growth 112 (2/3), 309 (1991).CrossRefGoogle Scholar
18.Noda, K., Sakamoto, W., Yogo, T., and Hirano, S., J. Am. Ceram. Soc. 80 (9), 2437 (1997).CrossRefGoogle Scholar
19.Yogo, T., Takeichi, Y., Kikuta, K., and Hirano, S., J. Am. Ceram. Soc. 78 (6), 1649 (1995).CrossRefGoogle Scholar
20.Shinmou, K., Tohge, N., and Minami, T., Jpn. J. Appl. Phys. 33 (8B), L1181 (1994).CrossRefGoogle Scholar
21.Tohge, N., Shinmou, K., and Minami, T., Proc. of SPIE (Sol-Gel Optics III) 2288, 589 (1994).Google Scholar
22.Dijkgraaf, C. and Rousseau, J. P. G., Spectrochimica Acta A 24 (8), 1213 (1968).CrossRefGoogle Scholar
23.Hartman, H., Schlafer, H. L., and Hansen, K. H., Z. Anorg. Allgen. Chem. 284 (1–3), 153 (1956).CrossRefGoogle Scholar
24.Hunt, M.R. and Winter, G., Inorg. Nucl. Chem. Lett. 6 (6), 529 (1970).CrossRefGoogle Scholar
25.Jacco, J. C., Mater. Res. Bull. 21 (10), 1189 (1986).CrossRefGoogle Scholar