Published online by Cambridge University Press: 21 May 2018
The electron source brightness is an important parameter of an electron microscope. Reliable and easy brightness measurement routes are not easily found. A determination method for the illumination semi-angle distribution in transmission electron microscopy is even less well documented. Herein, we report a facile measurement route for both entities and demonstrate it on a state-of-the-art instrument. The reduced axial brightness of the FEI X-FEG with a monochromator was determined to be larger than 108 A/(m2 sr V).
Cite this article: Börrnert F, Renner J, Kaiser U (2018) Electron Source Brightness and Illumination Semi-Angle Distribution Measurement in a Transmission Electron Microscope. Microsc Microanal 24(3): 249–255. doi: 10.1017/S1431927618000223