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Chemical Characterization of Silicon-Germanium Single Crystals – Initial Evaluation of the Extent of Heterogeneity

Published online by Cambridge University Press:  01 August 2002

R. B. Marinenko ,
J. T. Armstrong ,
S. Turner ,
E. B. Steel  and
F. A. Stevie
R. B. Marinenko
Affiliation:
National Institute of Standards and Technology (NIST), MS 8371, Gaithersburg, MD 20899
J. T. Armstrong
Affiliation:
National Institute of Standards and Technology (NIST), MS 8371, Gaithersburg, MD 20899
S. Turner
Affiliation:
National Institute of Standards and Technology (NIST), MS 8371, Gaithersburg, MD 20899
E. B. Steel
Affiliation:
National Institute of Standards and Technology (NIST), MS 8371, Gaithersburg, MD 20899
F. A. Stevie
Affiliation:
Analytical Instrumentation Facility, Room 318, EGRC Box 7531, 1010 Main Campus Drive North Carolina State University, Raleigh, NC 27695-7531

Abstract

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Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1490 - 1491
Copyright
Copyright © Microscopy Society of America 2002