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Focused Ne+ Beam for Improved SIMS Analysis of Lithium Ion Batteries

Published online by Cambridge University Press:  05 August 2019

Fouzia Khanom*
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, One Corporation Way, Peabody, MA, USA.
U. Golla-Schindler
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany.
Timo Bernthaler
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany.
Gerhard Schneider
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany.
Brett Lewis
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, One Corporation Way, Peabody, MA, USA.
*
*Corresponding author: fouzia.khanom@zeiss.com
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Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Hlawacek, G and Gölzhäuser, A in “Helium Ion Microscopy”, (Springer, Switzerland).CrossRefGoogle Scholar
[2]Wirtz, T, Vanhove, N, Pillatsch, L, Dowsett, D, Sijbrandij, S, and Notte, J, Appl. Phys. Lett. 101 (2012).CrossRefGoogle Scholar
[3]Dowsett, D and Wirtz, T, Anal. Chem. 89 (2017), pp. 8957-8965.CrossRefGoogle Scholar
[4]Wirtz, T, Philipp, P, Audinot, J-N, Dowsett, D, Eswara, S, Nanotechnology 26 (2015), p. 434001.CrossRefGoogle Scholar
[5]Gratia, P, et al. , J. Am. Chem. Soc. 138 (2016), pp. 582115824.CrossRefGoogle Scholar
[6]Gratia, P, et al. , ACS Energy Lett. 2 (2017), pp. 2686-2693.CrossRefGoogle Scholar
[7]Vollnhals, F, et al. , Anal. Chem. 89 (2017), pp. 10702-10710.CrossRefGoogle Scholar
[8]Golla-Schindler, U, Zeibig, D, Prickler, L, Behn, S, Bernthaler, T, Schneider, G, Micron 113 (2018), pp. 10-19.CrossRefGoogle Scholar
[9]The authors from Aalen University want to acknowledge C. Guenther and M.A. Danzer for the samples and Federal Ministry for Economic Affairs and Energy (BMWi) Germany, for financial supportGoogle Scholar
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