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Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures

  • Andreas Spath (a1), Florian Vollnhals (a1), Fan Tu (a1) (a2), Kevin C. Prince (a3), Robert Richter (a3), Jorg Raabe (a4), Hubertus Marbach (a1) and Rainer H. Fink (a1) (a5)...
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      Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures
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* Corresponding author, andreas.spaeth@fau.de
References
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[1] Spath, A, etal, RSC Adv. 6 2016 98344.
[2] Tu, F, et al, J. Vac. Sci. Technol. B 35(3 2017 031601.
[3] Wang, J, et al, J. Phys. Chem. C 111 2007 16330.
[4] Cazaux, J J. Microsc. 188(2 1997 106.
[5] Tu, F, et al, Nanotechnology 27 2016 355302.
[6] The authors gratefully acknowledge support by B. Watts and B. Sarafimov during beamtime at the PolLux beamline. H.M. acknowledges funding by DFG grant MA 4246/1-2, Cost action 1301 CELINA and MSCA-ITN 2016. R.H.F. acknowledges funding by the German Minister of Education and Research, contract 05 K16 WED. A.S. acknowledges funding by DFG grant SP 1775/1-1.
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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