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The Formation and Utility of Sub-Angstrom to Nanometer-Sized Electron Probes in the Aberration-Corrected Transmission Electron Microscope at the University of Illinois

  • Jianguo Wen (a1), James Mabon (a1), Changhui Lei (a1), Steve Burdin (a1), Ernie Sammann (a1), Ivan Petrov (a1), Amish B. Shah (a1) (a2), Varistha Chobpattana (a1) (a2), Jiong Zhang (a2), Ke Ran (a2) (a3), Jian-Min Zuo (a1) (a2), Satoshi Mishina (a4) and Toshihiro Aoki (a4)...
Abstract

We evaluate the probe forming capability of a JEOL 2200FS transmission electron microscope equipped with a spherical aberration (Cs) probe corrector. The achievement of a real space sub-Angstrom (0.1 nm) probe for scanning transmission electron microscopy (STEM) imaging is demonstrated by acquisition and modeling of high-angle annular dark-field STEM images. We show that by optimizing the illumination system, large probe currents and large collection angles for electron energy loss spectroscopy (EELS) can be combined to yield EELS fine structure data spatially resolved to the atomic scale. We demonstrate the probe forming flexibility provided by the additional lenses in the probe corrector in several ways, including the formation of nanometer-sized parallel beams for nanoarea electron diffraction, and the formation of focused probes for convergent beam electron diffraction with a range of convergence angles. The different probes that can be formed using the probe corrected STEM opens up new applications for electron microscopy and diffraction.

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Corresponding author
Corresponding author. E-mail: jgwen@illinois.edu
References
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Allard, L.F., Blom, D.A., O'Keefe, M.A. & Mishina, S. (2005). Design and performance characteristics of the ORNL advanced microscopy laboratory and JEOL 2200FS-AC aberration-corrected STEM/TEM. Microsc Microanal 11, 21362137.
Batson, P.E., Dellby, N. & Krivanek, O.L. (2002). Sub-angstrom resolution using aberration corrected electron optics. Nature 418, 617620.
Blom, D.A., Allard, L.F., Mishina, S. & O'Keefe, M.A. (2006). Early results from an aberration-corrected JEOL 2200FS STEM/TEM at Oak Ridge National Laboratory. Microsc Microanal 12, 483491.
Botton, G.A. (2008). The Canadian Centre for Electron Microscopy: A national facility for ultrahigh resolution electron microscopy. Int J Nanotechnol 5, 10821093.
Dwyer, C., Kirkland, A.I., Hartel, P., Mueller, H. & Haider, M. (2007). Electron nanodiffraction using sharply focused parallel probes. Appl Phys Lett 90, 151104.
Freitag, B., Kujawa, S., Mul, P.M., Ringnalda, J. & Tiemeijer, P.C. (2005). Breaking the spherical and chromatic aberration barrier in transmission electron microscopy. Ultramicroscopy 102, 209214.
Haider, M., Muller, H. & Uhlemann, S. (2008). Present and future hexapole aberration correctors for high-resolution electron microscopy. In Advances in Imaging and Electron Physics, Hawkes, P. (Eds.), vol. 153, pp. 43-+. San Diego, CA: Elsevier Academic Press Inc.
Haider, M., Uhlemann, S. & Zach, J. (2000). Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM. Ultramicroscopy 81, 163175.
Holmestad, R., Jiang, B. & Zuo, J.M. (2006). STEM contrast in perovskite materials. In 16th International Microscopy Congress, vol. 2, p. 608. Sapporo, Japan.
Huang, W.J., Sun, R., Tao, J., Menard, L.D., Nuzzo, R.G. & Zuo, J.M. (2008). Coordination-dependent surface atomic contraction in nanocrystals revealed by coherent diffraction. Nat Mater 7, 308313.
Huang, W.J., Zuo, J.M., Jiang, B., Kwon, K.W. & Shim, M. (2009). Sub-angstrom-resolution diffractive imaging of single nanocrystals. Nat Phys 5, 129133.
Hutchison, J.L., Titchmarsh, J.M., Cockayne, D.J.H., Doole, R.C., Hetherington, C.J.D., Kirkland, A.I. & Sawada, H. (2005). A versatile double aberration-corrected, energy filtered HREM/STEM for materials science. Ultramicroscopy 103, 715.
Inada, H., Wu, L., Wall, J., Su, D. & Zhu, Y. (2009). Performance and image analysis of the aberration-corrected Hitachi HD-2700C STEM. J Elect Microsc 58, 111122.
Kirkland, A.I., Haigh, S. & Chang, L.-Y. (2008). Aberration corrected TEM: Current status and future prospects. J Phys 126, 0120340122039.
Klie, R.E., Johnson, C. & Zhu, Y.M. (2008). Atomic-resolution STEM in the aberration-corrected JEOL JEM2200FS. Microsc Microanal 14, 104112.
Krivanek, O.L., Corbin, G.J., Dellby, N., Elston, B.F., Keyse, R.J., Murfitt, M.F., Own, C.S., Szilagyi, Z.S. & Woodruff, J.W. (2008). An electron microscope for the aberration-corrected era. Ultramicroscopy 108, 179195.
Krivanek, O.L., Dellby, N. & Lupini, A.R. (1999). Towards sub-angstrom electron beams. Ultramicroscopy 78, 111.
Muller, D.A., Kirkland, E.J., Thomas, M.G., Grazul, J.L., Fitting, L. & Weyland, M. (2006). Room design for high-performance electron microscopy. Ultramicroscopy 106, 10331040.
Pennycook, S.J. & Jesson, D.E. (1990). High-resolution incoherent imaging of crystals. Phys Rev Lett 64, 938941.
Pennycook, S.J. & Jesson, D.E. (1991). High-resolution Z-contrast imaging of crystals. Ultramicroscopy 37, 1438.
Rose, H. (1981). Correction of aperture aberrations in magnetic systems with threefold symmetry. Nucl Instrum Methods 187, 187199.
Sawada, H., Tomita, T., Naruse, M., Honda, T., Hambridge, P., Hartel, P., Haider, M., Hetherington, C., Doole, R., Kirkland, A., Hutchison, J., Titchmarsh, J. & Cockayne, D. (2005). Experimental evaluation of a spherical aberration-corrected TEM and STEM. J Elec Microsc 54, 119121.
Xu, P.R., Kirkland, E.J., Silcox, J. & Keyse, R. (1990). High-resolution imaging of silicon (111) using a 100 keV stem. Ultramicroscopy 32, 93102.
Zuo, J.M., Gao, M., Tao, J., Li, B.Q., Twesten, R. & Petrov, I. (2004). Coherent nano-area electron diffraction. Microsc Res Tech 64, 347355.
Zuo, J.M., Kim, T., Celik-Aktas, A. & Tao, J. (2007). Quantitative structural analysis of individual nanotubes by electron diffraction. Zeitschrift für Kristallographie 222, 625633.
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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