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Microscopy and Microanalysis Microscopy and Microanalysis

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Influence of Saturation of Magnetic Lens Material on Fields of Deflectors and Parasitic Fields

Published online by Cambridge University Press:  28 September 2015

J. Zlámal  and
B. Lencová
J. Zlámal
Affiliation:
Institute of Physical Engineering, Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic CEITEC BUT, Technická 10, 616 69 Brno, Czech Republic
B. Lencová
Affiliation:
Institute of Physical Engineering, Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic TESCAN Brno, s.r.o., Libušina tř. 1, 62300 Brno, Czech Republic
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Abstract

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Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 188 - 193
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Zlámal, J & Lencová, B, Nucl. Instr. Meth. A 645 (2011). p. 278.CrossRefGoogle Scholar
[2]Lencová, B, Nucl. Instr. Meth. A 519 (2004). p. 133.CrossRefGoogle Scholar
[3]Lenc, M & Lencová, B, Rev. Sci, Instrum. 68 (1997). p. 4409.CrossRefGoogle Scholar
[4]Lencová, B, Lenc, M & van der Mast, K D, J. Vac. Sci. Technol. B 7 (1989). p. 1846.CrossRefGoogle Scholar
[5]Sháněl, O, Zlámal, J & Oral, M, Ultramicroscopy 137 (2014). p. 1.CrossRefGoogle Scholar
[6]Kato, M & Tsuno, K, IEEE Trans. Magn. 26 (1990). p. 1023.CrossRefGoogle Scholar
[7] W Scherle, Berechnung von magnetischen Ablenksystemen, Dissertation, Tübingen 1983.Google Scholar
[8]Hawkes, PW & Kasper, E in Principles of Electron Optics, Vol. 2. Academic Press (1996). p. 835.Google Scholar
[9]Sturrock, PA, Phil. Trans. Roy. Soc. London A 243 (1951). p. 387.Google Scholar
[10]Lencová, B, Optik 79 (1988). p. 1.Google Scholar
[11] This work was supported by European Regional Development Fund (CEITEC-CZ.1.05/1.1.00/02.0068)..Google Scholar
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