Hostname: page-component-848d4c4894-nmvwc Total loading time: 0 Render date: 2024-06-17T10:25:35.898Z Has data issue: false hasContentIssue false

Methods of the electron induced cleanning in SEM

Published online by Cambridge University Press:  30 July 2021

Ilona Müllerová
Affiliation:
Institute of Scientific Instruments of the Czech Academy of Sciences, Brno, Czech Republic
Ivo Konvalina
Affiliation:
Institute of Scientifics Instruments of the Czech Academy of Sciences, Brno, Czech Republic
Eliška Materna Mikmeková
Affiliation:
Institute of Scientific Instruments of the Czech Academy of Sciences, Brno, Czech Republic

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Analytical STEM-in-SEM
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Müllerová, I, et al. : Microsc. Microanal. 21 (Suppl 3), 2015CrossRefGoogle Scholar
Müllerová, I and Frank, L, Advanced in Imaging and Electron Physics 128 (2003) p. 309CrossRefGoogle Scholar
Materna Mikmeková, E, et al. : Journal of Electron Spectroscopy and Related Phenomena 241 (2020) 146873Google Scholar
The authors acknowledge the funding from the Technology Agency of the Czech Republic, no: TN01000008.Google Scholar