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On the Calculation of SEM and FIB Beam Profiles

Published online by Cambridge University Press:  28 September 2015

Jolana Kološová
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Tomáš Hrnčíř
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Jaroslav Jiruše
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Miroslav Rudolf
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Jakub Zlámal
Affiliation:
Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic CEITEC BUT, Technická 10, 616 69 Brno, Czech Republic
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Abstract

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Type
Numerical Methods
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Reimer, L in Scanning Electron Microscopy. Springer, Berlin), 1998). p. 51.CrossRefGoogle Scholar
[2]Guo, X, et al, Optik 120 (2009). p. 207.CrossRefGoogle Scholar
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[4]Sato, M in Handbook of Charged Particle Optics, 2nd edition, ed. J Orloff, (CRC Press, Boca Raton. p. 391.Google Scholar
[5]Bronsgeest, M, Physics of Schottky Electron Sources, PhD Thesis ( TU Delft 2009.Google Scholar
[6]Joy, DC, et al, SPIE Proc. Ser. 3998 (2000). p. 108.CrossRefGoogle Scholar
[7]Lencova, B & Zlamal, J, Phys. Procedia 1 (2008). p. 315.CrossRefGoogle Scholar
[8]Munro, E in Handbook of Charged Particle Optics, 1st edition, ed. J Orloff, (CRC Press, (LLC, Boca Raton) p. 72.Google Scholar
[9]Smith, SW in The Scientist & Engineer's Guide to Digital Signal Processing. California Technical Publishing), 1997). p. 397.Google Scholar
[10]Sakawa, S, et al, Surf. Interface Anal. 35 (2003). p. 11.CrossRefGoogle Scholar
[11] The authors acknowledge funding from FR-TI2/736 (MOREMIT) and the European Regional Development Fund (CEITEC-CZ.1.05/1.1.00/02.0068).Google Scholar
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