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TEM Specimen Preparation with Plasma FIB Xe+ Ions

Published online by Cambridge University Press:  09 April 2017

L Giannuzzi
Affiliation:
L A Giannuzzi & Associates LLC
N Smith
Affiliation:
Oregon Physics, LLC

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011