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You Do What in Your Microprobe?! The EPMA as a Multimode Platform for Nitride Semiconductor Characterization

  • Paul R. Edwards (a1), G. Naresh-Kumar (a1), Gunnar Kusch (a1), Jochen Bruckbauer (a1), Lucia Spasevski (a1), Catherine G. Brasser (a1), Michael J. Wallace (a1), Carol Trager-Cowan (a1) and Robert W. Martin (a1)...
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[1] Wallace, M. J., et al, Journal of Applied Physics 116 2014) p. 033105.
[2] Naresh-Kumar, G., et al, Materials Science in Semiconductor Processing 47 2016) p. 44.
[3] Kusch, G., et al, Applied Physics Letters 104 2014) p. 092114.
[4] The authors thank Prof. P. Parbrook of the Tydall National Institute and Prof. T. Wang of the University of Sheffield for providing samples. Funding is acknowledged from the UK EPSRC through grants EP/M015181/1, EP/P02744X/1 and EP/P015719/1.
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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