Skip to main content Accessibility help
×
Home

3D Photonic Structures by Sol-Gel Imprint Lithography

  • Marc Verschuuren (a1) and Hans Van Sprang (a1)

Abstract

We present a new and relatively simple process to manufacture three-dimensional sub-micron structures over square centimeter areas using a soft stamp imprinting process. The room-temperature replication process shows excellent quality in transferring features directly into inorganic silica material with pattern distortion smaller than 0.03% over an area of 15×15mm2. Using a self assembly planarization method the imprinting process can be repeated to form three-dimensional structures. As a demonstration, a multilayer stack of four crossed gratings is shown.

Copyright

References

Hide All
1. Malkovaa, Natalia, Ning, C. Z., Phys. Rev. Lett. 87, 161113 (2005).
2. Umemori, Ken-ichi, Kanamori, Yoshiaki, Hanea, Kazuhiro, Appl. Phys. Lett. 89, 021102 (2006).
3. Kim, Sang Hoon, Lee, Ki-Dong, Kim, Ja-Yeon, Kwon, Min-Ki, Park, Seong-Ju, Nanotechnology 18, 055306 (2007)
4. McNab, Sharee J., Moll, Nikolaj, Vlasov, Yurii A., Optics Expr. 11, 2927 (2003)
5. Gralak, Boris, Dood, Michiel de, Tayeb, Gérard, Enoch, Stefan, Maystre, Daniel, Phys. Revf. B 67, 066601 (2003)
6. Odom, Teri W., Love, J. Christopher, Wolfe, Daniel B., Paul, Kateri E., Whitesides, George M., Langmuir 18, 5314 (2002)
7. Marzolin, Christian, Smith, Stephen P., Prentiss, Mara, Whitesides, George M., Adv. Mater. 10, No. 8, 571 (1998)
8. Schueller, Olivier J. A., Whitesides, George M., Rogers, John A., Meier, Martin, Dodabalapur, Ananth, Appl. Optics, 38, 5799 (1999)
9. Fleming, J. G., Lin, Shawn-Yu, Optics Lett. 24, 49 (1999)
10. Lin, S. Y., Fleming, J. G., Hetherington, D. L., Smith, B. K., Biswas, R., Ho, K. M., Sigalas, M. M., Zubrzycki, W., Kurtz, S. R., Bur, Jim, Nature 394, 251 (1998)
11. Xie, R., Karim, A., Douglas, J. F., Han, C. C., Weiss, R. A., Phys. Rev. Lett. 81, 1251 (1998)
12. Kim, Youn San, Lee, Hong h., Adv. Mater. 15, 332 (2003)

3D Photonic Structures by Sol-Gel Imprint Lithography

  • Marc Verschuuren (a1) and Hans Van Sprang (a1)

Metrics

Altmetric attention score

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed