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Studies on Curvature Deformation Control of Bilayer Cantilever Fabricated by Surface Micromachining of SOI Wafer
Published online by Cambridge University Press: 26 February 2011
The Cr/Si bilayer cantilevers for an integrated multi-axis tactile sensor were fabricated by Si surface micromachining process. Among the cantilevers with various shapes, the rectangular and semicircular cantilevers can be deflected upward with good controllability. The maximum deflections are compared with those calculated by finite element method. Calculated deflections of Cr/Si cantilever agree considerably with the measured one. So, it is considered that the analysis by finite element method is useful as optimization of layer thickness and size to obtain the Cr/Si bilayer cantilevers with accurate deflection.
- Research Article
- MRS Online Proceedings Library (OPL) , Volume 969: Symposium W – Heterogeneous Integration of Materials for Passive Components and Smart Systems , 2006 , 0969-W05-01
- Copyright © Materials Research Society 2007