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Application of Energy-Filtering Transmission Electron Microscopy on Advanced IC Device Processing
Published online by Cambridge University Press: 10 February 2011
Abstract
Energy-filtering TEM is applied to characterize the microstructures in ULSI devices. Three cases are shown for EFTEM applications: interfacial reactions in Al metallization, phase identification after arcing in Al metallization, and ONO structure.
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- Copyright © Materials Research Society 1998