Skip to main content
×
×
Home

Comparison Between Ion-Beam and Thermal-Annealing Induced Solid Phase Epitaxy in Fe-Implanted Si

  • X.W. Lin (a1), J. Desimoni (a2), H. Bernas (a2), Z. Liliental-Weber (a1) and J. Washburn (a1)...
Abstract

Rutherford backscattering spectrometry and transmission electron microscopy were used to compare thermally induced solid phase epitaxy (SPE) with ion-beam induced epitaxial crystallization (IBIEC) of Fe-implanted Si (001). It was found that thermal annealing leads to both Si SPE and β-FeSi2 precipitation at 520°C, but has no visible effect at 320°C. In contrast, Si SPE and FeSi2 precipitation occur at both 320 and 520°C, when ion irradiation is introduced. The precipitates grow epitaxially as γ-FeSi2 at 320°C, but consist of both β-FeSi2 and γ-FeSi2 at 520°C. It was also found that thermal annealing at 520°C results in Fe segregation toward the surface, while IBIEC basically retains the as-implanted Fe profile.

Copyright
References
Hide All
1. White, A., Short, K.T., Dynes, R.C., Garno, J.P., and Gibson, J.M., Appl. Phys. Lett. 50, 95 (1987);
2. Oostra, D.J., Vandenhoudt, D.E.W., Bulle-Lieuwma, C.W.T., and Naburgh, E.P., Appl. Phys. Lett. 59, 1737 (1991); K. Radermacher, S. Mantl, Ch. Dieker, and H. Liith, ibid. 59, 2145 (1991).
3. Desimoni, J., Bernas, H., Behar, M., Lin, X.W., Washburn, J., and Liliental-Weber, Z., Appl. Phys. Lett., 62, 306 (1993).
4. Lin, X. W., Behar, M., Desimoni, J., Bernas, H., Washburn, J., and Liliental-Weber, Z., Appl. Phys. Lett. 63, 105 (1993), and references therein.
5. Lin, X.W. et al. (to be published).
6. Priolo, F., Spinella, C., and Rimini, E., Phys. Rev. B 41, 5235 (1990).
7. Weber, E.R., Appl. Phys. A 30, 1 (1983).
8. Souza, J.P. de, Amaral, L., and Fichtner, P.F.P., J. Appl. Phys. 71, 5423 (1992).
9. Poate, J.M., Jacobson, D.C., Priolo, F., and Thompson, M.O., Mat. Res. Sco. Symp. Proc. vol. 128, 533 (1989), and references therein
10. Lin, X.W., Liliental-Weber, Z., Washburn, J., Desimoni, J., and Bernas, H., Proc. 51st Annual Meeting of the Microscopy Society of America, edited by Bailey, G.W. and Rieder, C.L., (San Francisco Press, San Francisco, 1993), p. 808.
11. Derrien, J., Chevrier, J., Thanh, V. Le, and Mahan, J.E., Appl. Surf. Sci. 56–58, 382, (1992), and references therein.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 8 *
Loading metrics...

Abstract views

Total abstract views: 42 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 21st August 2018. This data will be updated every 24 hours.