Skip to main content Accessibility help

Effect of Oxygen on Diamond Deposition in CH4/O2/H2 Gas Mixtures

  • H. Matsuyama (a1), N. Sato (a1) and H. Kawakami (a1)


Diamond growth experiments were carried out by a microwave plasma assisted CVD technique in various gas mixtures of CH4(0–100%)/02/H2. The phase diagram obtained by this study shows that a diamond growth region exists. With addition of more than 5% O2 in reactant gases, diamond particles could be included in amorphous or graphitic carbon films even using CH4/O2 gas mixtures. Faceted diamond films were obtained if the oxygen gas concentration [O2] was approximately more than half the methane gas concentration [CH4] ([O2]>[CH4]/2). However, no films were grown when [O2] exceeded half of [CH4] plus 7% ([O2]>[CH4]/2+7%). These results corresponded to the observations by plasma emission spectroscopy. Though oxygen etches carbon films and decomposes methane by forming carbon monoxide, oxygen rarely reacts with hydrogen in a film growth region.



Hide All
1. Hirose, Y. and Terasawa, Y., Jpn. J. Appl. Phys. 25, L519 (1986).
2. Ito, K., Ito, T. and Hosoya, I., Chem. Lett. 4, 589 (1988).
3. Suzuki, J., Kawarada, H., Mar, K., Wei, J., Yokota, Y. and Hiraki, A., Jpn. J. Appl. Phys. 28, L281 (1989).
4. Matsui, Y., Yuuki, A., Sahara, M. and Hirose, Y., Jpn. J. Appl. Phys. 28, 1718 (1989).
5. lnspektor, A., Liou, Y., McKenna, T. and Messier, R., Surf. Coat. Technol. 39/40, 211 (1989).
6. Saito, Y., Sato, K., Tanaka, H., Fujita, K. and Matsuda, S., J. Mater. Sci. 23, 842 (1988).
7. Bachmann, P.K., Leers, D. and Lydtin, H., Diamond Rel. Mater. 1, 1 (1991).
8. Kawato, T. and Kondo, K., Jpn. J. Appl. Phys. 26, 1429 (1987).
9. Chang, C.P., Flamm, D.L., Ibbotson, D.E. and Mucha, J.A., J. Appl. Phys. 63, 1744 (1988).
10. Chen, C.F., Huang, Y.C., Hosomi, S. and Yoshida, I., Mat. Res. Bull. 24, 87 (1989).
11. Mucha, J.A., Flamm, D.L. and Ibbotson, D.E., J. Appl. Phys. 65, 3448 (1989).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed