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Effects of Defects on Metal-Insulator-Semiconductor Properties of HgCdTe Films Grown by Liquid Phase Epitaxy

Published online by Cambridge University Press:  21 February 2011

Dipankar Chandra
Affiliation:
Infrared Devices Laboratory, Texas Instruments, Incorporated; Dallas, Texas
Michael W. Goodwin
Affiliation:
Infrared Devices Laboratory, Texas Instruments, Incorporated; Dallas, Texas
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Abstract

A comprehensive study of all materials parameters influencing metal-insulator-semiconductor (MIS) properties of n-type HgCdTe films grown by liquid phase epitaxy from tellurium rich melts was conducted. When the epitaxy process was optimized to grow films free of inclusions and terracing, the first indications of the MIS properties to be expected could be obtained from the temperature dependence of the Hall electron mobility.

Films displaying an anomalous dependence of the Hall mobility on temperature yielded non-classical low frequency MIS properties with little or no measurable ‘dark’ storage times (< 2×10−6 second). The MIS performance of these films appeared relatively independent of other materials parameters; remaining, for example, virtually unaffected by the film dislocation density changing between 5×104 and 2 × 106/cm2.

Films displaying a classical dependence of the Hall mobility on temperature yielded drastically improved classical high frequency MIS properties. For these films, the MIS performance appeared almost exclusively dependent on dislocation density levels as long as the donor density remained lower than 1×1015/cm3. The dark storage time of classical films increased continuously with decreasing dislocation density levels, rising to 100µsec for a dislocation density level of 1 × 105/cm2 for materials with a 77°K cutoff wavelength of 10.5 µm. A simple monotonic relationship could be established between the MIS performance parameters and the dislocation density over the entire measurement span: from 5×104 to 2.5×106/cm2.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. Kinch, M.A., in Semiconductors and Semimetals, Vol. 18, “Mercury Cadmium Telluride,” ed. by Willardson, R.K. and Beer, A.C. (1981).Google Scholar
2. Colombo, L. and Syllaios, A.J., IRIS Detector Specialty Group, July, 1982.Google Scholar
3. Chen, M.C., Parker, S.G., and Weirauch, D.F., J. Appl. Phys. 58, 3150 (1985).Google Scholar
4. Lou, L.F. and Frye, W.H., J. Appl. Phys. 56, 2253 (1984).Google Scholar
5. Pelliciari, B. and Baret, G., J. Appl. Phys. 62, 3986 (1987).Google Scholar
6. Chandra, D. (unpublished data), to be submitted for publication.Google Scholar
7. Parker, S.G., Weirauch, D.F. and Chandra, D., J. Crystal Growth 86, 173 (1988).Google Scholar
8. Wan, C.F., Weirauch, D.F., Korenstein, R., Bylander, E.G., and Castro, C.A., J. Electron. Mater. 15, 151 (1986).Google Scholar
9. Takigawa, H., Yoshikawa, M., and Maekawa, T., J. Cryst. Growth 86, 446 (1988).Google Scholar
10. Weirauch, D.F. (private communication).Google Scholar
11. Chandra, D. and Goodwin, M.W., IRIS Materials Specialty Group, June, 1988.Google Scholar
12. Schaake, H.F., Tregilgas, J.H., Beck, J.D., Kinch, M.A. and Gnade, B.E., J. Vac. Sci. Technol. A3, 143 (1985).Google Scholar
13. Chandra, D., Proceedings of the Materials Research Society Fall Meeting, Boston, Massachusetts (1989).Google Scholar
14. Chandra, D. and Tregilgas, J.H. (unpublished data), to be submitted for publication.Google Scholar