Hostname: page-component-76fb5796d-2lccl Total loading time: 0 Render date: 2024-04-26T01:14:26.745Z Has data issue: false hasContentIssue false
  • English
  • Français

Ferroelectric Thin Films for Microelectromechanical Device Applications

Published online by Cambridge University Press:  15 February 2011

D. L. Polla ,
W. P. Robbins ,
T. Tamagawa  and
C. Ye
D. L. Polla
Affiliation:
Department of Electrical Engineering, University of Minnesota, Minneapolis, Minnesota USA 55455
W. P. Robbins
Affiliation:
Department of Electrical Engineering, University of Minnesota, Minneapolis, Minnesota USA 55455
T. Tamagawa
Affiliation:
Department of Electrical Engineering, University of Minnesota, Minneapolis, Minnesota USA 55455
C. Ye
Affiliation:
Department of Electrical Engineering, University of Minnesota, Minneapolis, Minnesota USA 55455
Get access

Abstract

Ferroelectric thin films of the lead zirconate titanate family have been integrated with silicon-based micromachined structures in the fabrication of microelectromechanical devices. Sol-gel deposition techniques have been applied in the formation of ferroelectric thin films with high piezoelectric and pyroelectric coefficients for physical forces sensors and infrared detectors, respectively. Knowledge of both electrical and mechanical properties is important in realizing microelectromechanical devices with predictable performance. This pape reports piezoelectric coefficient, pyroelectric coefficient, dielectric constant, and Young's modulus for lead zirconate titanate and lead titanate thin films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 3
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Mcrosensors, Muller, R. S., Howe, R. T., Senturia, S. D., Smith, R. L., and White, R. M., eds., IEEE Press, 1990.Google Scholar
[2] Senturia, S. D., IEEE Int. Electron Dev. Mtg, Washington, D.C., 1989.Google Scholar
[3] Howe, R. T., Muller, R. S., Gabriel, K. J., and Trimmer, W. S. N., IEEE Sprectrum, July 1990, p. 29.CrossRefGoogle Scholar
[4] Three technical journals in this field are Sensors and Actuators, IEEE Journal of Microelectromechanical Systems, and Journal of Micromechanics and Microengineering.Google Scholar
[5] Vest, R. W. and Xu, J., IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, 35, 711 (1988).CrossRefGoogle Scholar
[6] Yi, G., Wu, Z., and Sayer, M., J. Appl. Phys., 64, 2717 (1988).CrossRefGoogle Scholar
[7] Dey, S. K. and Zuleeg, R., Ferroelectrics, 108, 37 (1990).CrossRefGoogle Scholar
[8] Tamagawa, T., Ye, C., Hsueh, C.-C., and Polla, D. L., 3rd International Symposium on Integrated Ferroelectrics, Colorado Springs, CO, Mar. 1991.Google Scholar
[9] Udayakumar, K. R., Bart, S. F., Flynn, A. M., Chen, J., Tavrow, L. S., Cross, L. E., Brooks, R. A., Ehrlich, D. J., IEEE Micro Electro Mechanical Systems, Nara, Japan, Proceedings, p. 109, (1991).Google Scholar
[10] Robbins, W. P., IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, UFFC-38, 461 (1991).CrossRefGoogle Scholar
[11] Polla, D. L., Ye, C., Schiller, P., and Tamagawa, T., Mat. Res. Soc. 1991 Fall Meeting, Boston, MA, Dec. 1991.Google Scholar
[12] Ye, C., Tamagawa, T., Lin, Y., and Polla, D. L., Mat. Res. Soc. 1991 Fall Meeting, Boston, MA, Dec. 1991.Google Scholar
[13] Tjhen, W., Ye, C.-P., Schiller, P., Tamagawa, T., and Polla, D. L., 3rd IEEE Workshop on Micro Electro Mechanical Systems, Nara, Japan, Jan. 1991.Google Scholar
[14] Timoshenko, S., Woinowsky-Krieger, S., Theory of Plates and Shells, McGraw-Hill, New York, 1959.Google Scholar
[15] Schiller, P., Polla, D. L., and Ghezzo, M., IEEE Solid-State Sensors and Actuators Workshop, Hilton Head, S.C., June 1990.Google Scholar
[16] Kim, E. S. and Muller, R. S., IEEE Electron Dev. Lett., vol. EDL–7, 254(1987) and E. S. Kim, M. S. Thesis, University of California, Berkeley, 1987.Google Scholar
[17] Polla, D. L., Ye, C., and Tamagawa, T., Appl. Phys. Lett., 59, p3539 1991.CrossRefGoogle Scholar
[18] Remeika, J. P. and Glass, A. M., Mater. Res. Bull. 5, 37 (1970).CrossRefGoogle Scholar
[19] Hsueh, C.-C., Tamagawa, T., Ye, C., Helgeson, A., and Polla, D. L., 3rd Int. Symposium on Integrated Ferroelectrics, Colorado Spring, CO, Mar. 1991.Google Scholar