Skip to main content Accessibility help

Film Synthesis on Powders by Cathodic ARC Plasma Deposition

  • André Anders, Simone Anders (a1), Ian G. Brown (a1) and Igor C. Ivanov (a2)

Cathodic arc plasma deposition was used to coat Al2O3 powder (mesh size 60) with platinum. the power particles were moved during deposition using a mechanical system operating at a resonance frequency of 20 Hz. Scanning electron microscopy and auger electron microscopy show that all particles are completely coated with a platinum film having a thickness of about 100 nm. the actual deposition time was only 20 s, thus the deposition rate was very high (5 nm/s).

Hide All
1 Powell, C. F., Oxley, J. H., and Blocher, J. M. Jr., Vapour Deposition, (Wiley, New York, 1966).
2 Itoh, H., Hattoria, K. and Naka, S., J. Mater. Sci. 24, 3643 (1989).
3 Khan, H. R. and Frey, H., J. of the Less-Common Metals 175, 177 (1991).
4 Garg, A. K. and De Jonghe, L. C., J. Mater. Res. 5, 136 (1990).
5 Kim, W.-J., Moon, Y. T., Kim, C. H., Kim, D. K., Lee, H.-W., J. Mater. Sci. Lett. 13, 1349 (1994).
6 Lafferty, J. M. (Editor), Vacuum arcs, (Wiley interscience, New York, 1980).
7 Jüttner, B., IEEE Trans. Plasma Sci. 15, 474 (1987).
8 Mesyats, G. A. and Proskurovsky, D. I., Pulsed Electrical Discharge in Vacuum, (Springer,Berlin, 1989).
9 Anders, A., Anders, S., Jüttner, B., Bötticher, W., Lück, H., and Schröder, G., IEEE Trans.Plasma Sci. 20, 466 (1992).
10 Martin, P. J., Netterfield, R. P., and Kinder, T. J., Thin Solid Films 193, 77 (1990).
11 Bendavid, A., Martin, P. J., Netterfield, R. P., and Kinder, T. J., Surface and Coatings Technology 70, 97 (1994).
12 McKenzie, D. R., Muller, D., Pailthorpe, B. A., Wang, Z. H., Kravtchinskaya, E., Segal, D., Lukins, P. B., Swift, P. D., Martin, P. J., Amaratunga, G., Gaskell, P. H., and Saeed, A., Diamond and Related Materials 1, 51 (1991).
13 Lossy, R., Pappas, D. L., Roy, R. A., Cuomo, J. J., and Sura, V. M., Appl. Phys. Lett. 61,171 (1992).
14 Aksenov, I. I., Vakula, S. I., Padalka, V. G., Strel'nitskii, V. E., and Khoroshikh, V. M., Zhurn. Tekh. Fiz. 50, 2000 (1980); Sov. Phys.-Tech. Phys. 25, 1164 (1980).
15 Anders, A., Anders, S., and Brown, I. G., Plasma Sources Sci. & Technol. 4, 1 (1995).
16 Boxman, R. L. and Goldsmith, S., Surface Coatings Technol. 52, 39 (1992).
17 Anders, A., Anders, S., Brown, I. G., Mat. Res. Soc. Symp. Proc. 316, 833 (1994).
18 Brown, I. G., Anders, A., Anders, S., Castro, R. A., Dickinson, M. R., MacGill, R. A., and Wang, Z., presented at the Ninth international Conference on Ion Beam Modification of Materials, Canberra, Australia, 1995 (unpublished).
19 MacGill, R. A., Anders, S., Anders, A., Castro, R. A., Dickinson, M. R., Yu, K. M., and Brown, I. G., Surface Coatings Technol. (1995) accepted for publication.
20 Biersack, J. P., Berg, S., and Nender, C., Nucl. INstrum. Meth. Phys. Res. B59/60, 21 (1991).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed