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Film Synthesis on Powders by Cathodic ARC Plasma Deposition

  • André Anders, Simone Anders (a1), Ian G. Brown (a1) and Igor C. Ivanov (a2)
Abstract
Abstract

Cathodic arc plasma deposition was used to coat Al2O3 powder (mesh size 60) with platinum. the power particles were moved during deposition using a mechanical system operating at a resonance frequency of 20 Hz. Scanning electron microscopy and auger electron microscopy show that all particles are completely coated with a platinum film having a thickness of about 100 nm. the actual deposition time was only 20 s, thus the deposition rate was very high (5 nm/s).

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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