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A High Resolution TEM Specimen Thinning System
Published online by Cambridge University Press: 21 February 2011
Abstract
Improvements in specimen preparation for TEM analysis are being constantly sought, particularly in the study of microelectronics' materials and in failure analysis of devices. We describe here a compact commercial system capable of thinning (milling) selected regions of a specimen by means of a scanned focused ion beam of sub-micron spatial resolution.
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- Copyright © Materials Research Society 1992