Skip to main content

High-Efficiency Microcrystalline Silicon and Microcrystalline Silicon-Germanium Alloy Solar Cells

  • Takuya Matsui (a1) and Michio Kondo (a1)

This paper presents our material studies on hydrogenated microcrystalline silicon (μc-Si:H) and microcrystalline silicon-germanium alloy (μc-Si1-xGex:H) thin films for the development of high efficiency p-i-n junction solar cells. In μc-Si:H solar cells, we have evaluated the structural properties of the intrinsic μc-Si:H layers grown by plasma-enhanced chemical vapor deposition at high deposition rates (>2 nm/s). Several design criteria for the device grade μc-Si:H are proposed in terms of crystallographic orientation, grain size and grain boundary passivation. Meanwhile, in μc-Si1-xGex:H solar cells, we have succeeded in boosting the infrared response of solar cell upon Ge incorporation up to x∼0.2. Nevertheless, a degradation of solar cell parameters is observed for large Ge contents (x>0.2) and thick i-layers (> 1 μm), which is attributed to the influence of the Ge dangling bonds that act as acceptorlike states in undoped μc-Si1-xGex:H. To improve the device performance, we introduce an oxygen doping technique to compensate the native defect acceptors in μc-Si1-xGex:H p-i-n solar cells.

Hide All
1Meier, J., Dubail, S., Flückiger, R., Keppner, H. and Shah, A., Appl. Phys. Lett. 65, 860 (1994).
2Yamamoto, K., IEEE Trans Electron Devices 46, 2041 (1999).
3Saito, K., Sano, M., Sakai, A., Hayashi, R. and Ogawa, K., Tech. Dig. 20th Int. PVSEC, Jeju, Korea (2001) p. 429.
4Nasuno, Y., Kondo, M. and Matsuda, A., Jpn. J. Appl. Phys. 41, 5912 (2002).
5Vetterl, O., Carius, R., Houben, L., Scholten, C., Luysberg, M., Lambertz, A., Finger, F. and Wagner, H., Mater. Res. Soc. Symp. Proc. 609, A15.2.1 (2000).
6Kondo, M., Fukawa, M., Guo, L. and Matsuda, A., J. Non-Cryst. Solids 266269, 84 (2000).
7Finger, F., Kroll, U., Viret, V., Shah, A., Beyer, W., Tang, X. -M., Weber, J., Howling, A. and Hollenstein, Ch., J. Appl. Phys. 71, 5665 (1992).
8Matsui, T., Kondo, M. and Matsuda, A., Jpn. J. Appl. Phys. 42, L901 (2002).
9Bailat, J., Fesquet, L., Orhan, J-B., Djeridane, Y, Wolf, B., Madliger, P., Steinhauser, J., Benagli, S., Borrello, D., Castens, L., Monteduro, G., Marmelo, M., Dehbozorghi, B., Vallat-Sauvain, E., Multone, X., Romang, D., Boucher, J-F., Meier, J, Kroll, U.,Despeisse, M., Bugnon, G., Ballif, C., Marjanovic, S., Kohnke, G., Borrelli, N., Koch, K., Liu, J., Modavis, R., Thelen, D., Vallon, S., Zakharian, A. and Weidman, D., Proc. of 5th WCPEC, Valencia, Spain (2010) p. 2720.
10Ganguly, G., Ikeda, T., Nishimiya, T., Saitoh, K., Kondo, M. and Matsuda, A., Appl. Phys. Lett. 69, 4224 (1996).
11Carius, R., Fölsch, J., Lundszien, D., Houben, L. and Finger, F., Mater. Res. Soc. Symp. Proc. 507, 813 (1998).
12Isomura, M., Nakahata, K., Shima, M., Taira, S., Wakisaka, K., Tanaka, M. and Kiyama, S., Sol. Energy Mater. & Sol.Cells 74, 519 (2002).
13Matsui, T., Takada, T., Chang, C. W., Isomura, M., Fujiwara, H. and Kondo, M., Appl. Phys. Express 1, 031501 (2008).
14Matsui, T., Jia, H. and Kondo, M., Prog. Photovolt: Res. Appl. 18, 48 (2010).
15Matsui, T., Jia, H., Kondo, M., Mizuno, K., Tsuruga, S., Sakai, S. and Takeuchi, Y., Proc. of 35th IEEE-PVSC, Hawaii, (2010) p. 000311.
16Matsui, T., Chang, C.W., Kondo, M., Ogata, K. and Isomura, M., Appl. Phys. Lett. 91, 102111 (2007).
17Torres, P., Meier, J., Flückiger, R., Kroll, U., Anna Selvan, J. A., Keppner, H., Shah, A., Littlewood, S. D., Kelly, I. E. and Giannoulès, P., Appl. Phys. Lett. 69, 1373 (1996).
18Smets, A.H.M., Matsui, T. and Kondo, M., Appl. Phys. Lett. 92, 033506 (2008).
19Vepřek, S., Iqbal, Z., Kühne, R. O., Capezzuto, P, Sarott, F-A. and Gimzewski, J. K., J. Phys. C: Solid State Phys. 16, 6241 (1983).
20Matsui, T., Tsukiji, M., Saika, H., Toyama, T. and Okamoto, H., Jpn. J. Appl. Phys. 41, 20 (2002).
21Braunstein, R., Moore, A. R., and Herman, F., Phys. Rev. 109, 695 (1958).
22Chang, C.W., Matsui, T. and Kondo, M., J. Non-Cryst. Solids 354, 2365 (2008).
23Yashiki, Y., Miyajima, S., Yamada, A. and Konagai, M., Jpn J. Appl. Phys. 46, 2865 (2007).
24Margalit, S., Bar-Lev, A., Kuper, A. B., Aharoni, H. and Neugroschel, A., J. Cryst. Growth 17, 288 (1972).
25Kilper, T., Beyer, W., Bräuer, G., Bronger, T., Carius, R., van den Donker, M. N., Hrunski, D., Lambertz, A., Merdzhanova, T., Mück, A., Rech, B., Reetz, W., Schmitz, R., Zastrow, U. and Gordijn, A., J. Appl. Phys. 105, 074509 (2009).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed