Skip to main content Accessibility help
×
×
Home

Highly Conductive In4Sn3O12 Films Prepared by Pulsed Laser Deposition

  • David H O'Neil (a1), Vladimir Kuznetsov (a2), Robert Jacobs (a3), Martin O Jones (a4) and Peter P Edwards (a5)...

Abstract

Highly conductive (> 103 Ω-1cm-1) and transparent (∼ 90%) In4Sn3O12 films have been deposited using pulsed laser deposition (PLD) on glass substrates held at a temperature of 500°C under varying pressures of oxygen (2.5 mTorr ≤ PO2 ≤ 15 mTorr). The crystallinity and the roughness of the films were found to increase with the pressure of oxygen used during deposition. Electron concentrations of the order of 5×1020 cm-3 and mobilities as high as 30 cm2V-1s-1 were derived from the measurement of Hall coefficients. Both the electronic transport and optical properties of the films were found to be strongly sensitive to the pressure of oxygen used during deposition.

Copyright

References

Hide All
[1] Edwards, P. P.; Porch, A.; Jones, M. O.; Morgan, D. V.; Perks, R. M. Dalton Transactions., 2295 (2004).
[2] Kimizuka, N.; Isobe, M.; Nakamura, M. Journal of Solid State Chemistry, 116, 170 (1995).
[3] Nadaud, N.; Lequeux, N.; Nanot, M. Journal of Solid State Chemistry, 135, 140 (1998).10.1006/jssc.1997.7613
[4] Bates, J.L.; Griffin, C.W; Marchant, D.A; Garnier, J.E., American Ceramic Society Bulletin, 65 (1986).
[5] Minami, T.; Takeda, Y.; Takata, S.; Kakumu, T. Thin Solid Films, 13, 308, (1007).
[6] Minami, T.; Kakumu, T.; Shimokawak, K.; Takata, S. Thin Solid Films, 317, 319 (1998).
[7] Minami, Y.; Takeda, Y.; Takata, S.; Kakumu, T. Thin Solid Films, 308, 13 (1997).
[8] Otis, C. E.; Dreyfus, R. W. Physical Review Letters, 67, 2102 (1991).
[9] Choisnet, J.; Bizo, L.; Retoux, S.; Hebert, S.; Raveau, B. Journal of Solid State Chemistry, 177, 3748 (2004).
[10] van der Pauw, L. J. Philips Technical Review, 20 (1958/1959).
[11] Wu, X.; Coutts, T. J.; Mulligan, W. P. Journal of Vacuum Science and Technology A. 15 1057 (1997).10.1116/1.580429
[12] Film Wizard; 6.5.1 Scientific Computing International. (1999).
[13] Burstein, E.; Physical Review 93, 632, (1954).10.1103/PhysRev.93.632
[14] Moss, T. S.; Proceedings of the Physical Society, B 67 775 (1954).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed