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Improved Mobilities and Resistivities in Modulation-Doped P-type AlGaN / GaN Superlattices

Published online by Cambridge University Press:  21 March 2011

Erik L. Waldron ,
John W. Graff ,
E. Fred Schubert  and
Amir M. Dabiran
Erik L. Waldron
Affiliation:
Boston University, Department of Physics and Electrical and Computer Engineering Department, Boston, MA 02215, U.S.A.
John W. Graff
Affiliation:
Boston University, Department of Physics and Electrical and Computer Engineering Department, Boston, MA 02215, U.S.A.
E. Fred Schubert
Affiliation:
Boston University, Department of Physics and Electrical and Computer Engineering Department, Boston, MA 02215, U.S.A.
Amir M. Dabiran
Affiliation:
SVT Associates, 7620 Executive Drive, Eden Prairie, MN 55344, U.S.A.
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Abstract

P-type AlGaN / GaN superlattice structures have demonstrated higher acceptor activation due to a modulated valence band resulting from the superlattice as well as spontaneous and piezoelectric polarization fields. The polarization effects are due to the wurtzite structure of AlGaN and the strain present in AlxGa1-xN / GaN heterostructures. Variable temperature Hall effect studies of Mg doped Al0.20Ga0.80N / GaN superlattices reveal an improvement in resistivity and mobility for modulation-doped structures versus uniformly doped structures. Very low resistivities less than 0.1 & cm and hole mobilities ~ 36 cm2/V s are demonstrated. This improvement is attributed to a reduction of neutral and ionized impurity scattering for the two-dimensional hole gas present in the GaN layers of the modulation-doped superlattice. The improvement is greatest at temperatures below ~ 150 K. The doped regions of the superlattices have Mg concentrations of ~1019 cm-3. Two modulation-doped samples were grown by MBE: a standard scheme with dopants only in the AlGaN barriers, and a shifted scheme with dopants concentrated near the AlGaN / GaN interfaces. The standard sample has mobilities of 8.9 and 36 cm2/V s at 300 and 90 K, respectively. Resistivities of the standard sample are 0.21 and 0.068 Ω cm at 300 and 90 K, respectively. Carrier concentrations for this sample are 3.4 and 2.5 x 1018 cm-3 at 300 and 90 K, respectively. Capacitance-voltage profiling on the samples shows a clear indication of a two-dimensional hole gas as well as the periodicity of the superlattice.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 693 , 2001 , I12.11.1
Copyright
Copyright © Materials Research Society 2002

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