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A Novel Range of Noble Metal Organometallic Fluorides for use in the Fabrication of Submicron Metal Features by E-Beam or UV Irradiation
Published online by Cambridge University Press: 10 February 2011
Summary
The preparation a nd characterisationo f a novel organoplatinum fluoride is described. The physical vapour deposition (PVD) of the material was performed in the temperature range 160–170°C, and electron beam bombardment or uv irradiation, results in the degradation of the compound to give high quality metal features down to dimensions of ca 60 nm.
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- Copyright © Materials Research Society 1999