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Optical and Crystallographic Studies of Ion-Implanted Relaxor Ferroelectric Lead Zinc Niobate for Single-Crystal Layer Transfer

Published online by Cambridge University Press:  02 August 2011

M. Levy  and
P. D. Moran
M. Levy
Affiliation:
Physics Department Michigan Technological University Houghton, MI 49931
P. D. Moran
Affiliation:
Physics Department Michigan Technological University Houghton, MI 49931
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Abstract

Layer separation of He+-ion implanted relaxor ferroelectric films (0.955)[Pb(Zn1/3Nb2/3)O3]–(0.045)[PbTiO3] (0.955PZN-0.045PT) has recently been reported in the literature.[1,2] Here we report on optical and X-ray diffraction analysis of the implanted material prior to separation. The formation of optical waveguides as a result of He+-ion implantation enables us to probe the sacrificial layer. A large refractive index contrast is observed between this layer and the film. Significant tetragonal distortions are also seen in the waveguide region (“the film”). Rapid thermal processing (RTP) significantly changes the peak position of the index contrast profile, possibly indicating a large redistribution of stress by He evolution in the sacrificial layer. A commensurate reduction in tetragonal distortion and local strain distribution in the waveguide region to values close to those observed before implantation is measured by triple crystal high resolution X-ray diffraction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 768: Symposium G – Integration of Heterogeneous Thin-Film Materials and Devices , 2003 , G4.5
Copyright
Copyright © Materials Research Society 2003

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References

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