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Possible Operation of Periodically Layered Nanocrystalline Porous Silicon as an Acoustic Band Crystal Device

Published online by Cambridge University Press:  01 February 2011

Akira Kiuchi ,
Bernard Gelloz ,
Akira Kojima  and
Nobuyoshi Koshida
Akira Kiuchi
Affiliation:
Department of Electrical and Electronic Engineering, Tokyo Univ. of A & T
Bernard Gelloz
Affiliation:
Department of Electrical and Electronic Engineering, Tokyo Univ. of A & T
Akira Kojima
Affiliation:
Department of Electrical and Electronic Engineering, Tokyo Univ. of A & T
Nobuyoshi Koshida
Affiliation:
Department of Electrical and Electronic Engineering, Tokyo Univ. of A & T
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Abstract

It is shown that the periodic stacked structures of nanocrystalline porous silicon (nc-PS) layers with controlled densities and elastic properties act as an acoustic band crystal (ABC) device. Supposing that the periodic nc-PS layers are formed by conventional modulated anodization technique to fabricate the multi-layered distributed Brag reflection mirror, the acoustic wave propagation modes are investigated theoretically for various structural parameters. According to the calculation results, a significant acoustic band gaps are generated in the ultrasonic regions due to a big contrast in the elastic constant produced between low-porosity and compact nc-PS layers. The propagation of acoustic wave can be completely suppressed in the characteristic band determined from designed parameters. The present result suggests further possibility of the nc-PS layer as a key component of ABC devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 832: Symposium F – Group IV Semiconductor Nanostructures , 2004 , F3.7
Copyright
Copyright © Materials Research Society 2005

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References

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