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Room Temperature Growth of Indium Tin Oxide Films By Ultraviolet-Assisted Pulsed Laser Deposition

  • V. Craciun (a1), D. Craciun (a2), Z. Chen (a1), J. Hwang (a3) and R.K. Singh (a1)...

The characteristics of indium tin oxide (ITO) films grown at room temperature on (100) Si and Coming glass substrates by an in situ ultraviolet-assisted pulsed laser deposition (UVPLD) technique have been investigated. The most important parameter, which influenced the optical and electrical properties of the grown films, was the oxygen pressure. For oxygen pressure below 1 mtorr, films were metallic, with very low optical transmittance and rather high resistivity values. The resistivity value decreased when using higher oxygen pressures while the optical transmittance increased. The optimum oxygen pressure was found to be around 10 mtorr. For higher oxygen pressures, the optical transmittance was better but a rapid degradation of the electrical conductivity was noticed. X-ray photoelectron spectroscopy investigations showed that ITO films grown at 10 mtorr oxygen are fully oxidized. All of the grown films were amorphous regardless of the oxygen pressure used.

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1 Kim, H., Pique, A., Horwitz, J. S., Mattoussi, H., Murata, H., Kafafi, Z. H., and Chrisey, D. B., Appl. Phys. Lett. 74, 3444 (1999).
2 Tang, C. W. and Slyke, S. A. Van, Appl. Phys. Lett. 51, 913 (1987).
3 Matsumoto, F., Asia Display'95, p. 31 (1995).
4 Chrisey, D. B. and Hubler, G. K., Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994.
5 Teghil, R., Marotta, V., Guidoni, A. Giardini, Palma, T. M. Di, Flamini, C., Appl. Surf. Sci. 138–139, 522 (1999).
6 Adurodija, F. O., Izumi, H., Ishira, T., Yoshioka, H., Yamada, K., Matsui, H., and Motoyama, M., Thin Solid Films 350, 79 (1999).
7 Yamada, Y., Suzuki, N., Makino, T., and Yoshida, T., J. Vac. Sci. Technol. A 18, 83 (2000).
8 Kim, H., Gilmore, C. M., Pique, A., Horwitz, J. S., Mattoussi, H., Murata, H., Kafafi, Z. H., and Chrisey, D. B., J. Appl. Phys. 86, 6451 (1999).
9 Akagi, Y., Hanamoto, K., Suzuki, H., Katoh, T., Sasaki, M., Imai, S., Tsudagawa, M., Nakayama, Y., and Miki, H., Jpn. J. Appl. Phys. 38, 6846 (1999).
10 Laux, S., Kaiser, N., Zoller, A., Gotzelmann, R., Lauth, H., and Bernitzki, H., Thin Solid Films 335,1 (1998).
11 Baulch, D. L., Cox, R. A., Hampson, R. F. Jr.,Kerr, J. A., Troe, J., and Watson, R.T., J. Phys. Chem. Ref. Data 9, 295 (1980).
12 Otis, C. E., Gupta, A., and Braren, B., Appl. Phys. Lett. 62, 102 (1993).
13 So, S. K., Choi, W. K., Cheng, C. H., Leung, L. M., and Kwong, C. F., Appl. Phys. A 68, 447 (1999).
14 Sugiyama, K., Ishii, H., Ouchi, Y., and Seki, K., J. Appl. Phys. 87, 295 (2000).
15 Craciun, V. and Singh, R.K., Electrochemical and Solid-State Lett. 2,446 (1999).
16 Craciun, V., Singh, R.K., Perriere, J., Spear, J., and Craciun, D., Appl. Phys. A 69 [Supl.], S531 (1999).
17 Kim, S-S., Choi, S-Y., Park, C-G., Jin, H-W., Thin Solid Films 347, 155 (1999).
18 Rhode, D., Kersten, H., Eggs, C., and Hippler, R., Thin Solid Films 305, 164 (1997).
19 Zhu, F., Huan, C. H. A., Zhang, K., and Wee, A. T. S., Thin Solid Films 359, 244 (2000).
20 Wengenmair, H., Gerlach, J. W., Preckwinkel, U., Stritzker, B., and Rauschenbach, B., Appl. Surf. Sci. 99, 313 (1996).
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