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Self-assembled nano-dots of heteroepitaxial SiC on Si
Published online by Cambridge University Press: 26 February 2011
Abstract
Self-assembled silicon carbide (SiC) nano-dots were fabricated on Si wafers by an organometallic ion beam deposition. The self-assembled SiC nano-dots have the shape of a tile, and were heteroepitaxial SiC on Si.
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- Copyright © Materials Research Society 2006