In this paper we present the TEM observations carried out on In0.52Al0.48As layers grown on InP at Tg+570°C. Plane view observations along the (100) zone axis show the existence of two types of contrast irregularity, with dark-bright fringes along the <010> directions and extinction for g +040 type reflections. One of these structures has been clearly related to precipitates at the lnAlAs/InP interface. The other, presents stacking fault-like fringes on the (100) plane, and the analysis of its traces on both (100) and (011) planes are presented. Despite the fact that its appearance resembles that of the structure linked to the precipitates, we will show that they are different phenomena and may even coexist.
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