Skip to main content

Strain-Field Induced Crosshatch Formation During Molecular Beam Epitaxy of InGaAs/GaAs Films

  • X. C. Zhou (a1) (a2), J. Jiang (a2) (a3), A. Y. Du (a3), J. W. Zhao (a2) (a3), S. M. Mu (a2), L.-M. Peng (a3) and Z. T. Zhong (a2)...

Using reflection electron microscopy (REM), transmission electron microscopy (TEM), and Nomarski optical microscopy we obtained direct evidence that local surface strain-fields, originated from misfit dislocations, are responsible for the formation of morphological crosshatches during molecular beam epitaxy of lattice mismatched InGaAs/GaAs layers. A mechanism is proposed to correlate the formation of the crosshatched patterns with the variation of the growth rate across the epitaxial surface under the perturbation of network shaped strain-fields in the surface.

Hide All
1Cho A. Y., J. Crystal Growth 111(1–4), 1 (1991).
2Osbum G. C., J. Vac. Sci. Technol. B1, 379 (1983).
3Ballingall J. M., Ho P., Tessmer G. J., Martin P. A., Lewis N., and Hall E. L., Appl. Phys. Lett. 54(21), 2121 (1989).
4Chen T. R., Eng L., Zhao B., Zhuang Y. H., Sanders S., Morkoc H., and Yariv Amnon, IEEE J. Quantum Electron. 26(7), 1183 (1990).
5Olsen G. H., J. Crystal Growth 31, 223 (1975).
6Chang Kevin H., Gibala Ronald, Srolovitz David J., Bhattacharya Pallab K., and Mansfield John F., J. Appl. Phys. 67(9), 4093 (1990).
7Fitzgerald E. A., Xie Y.-H., Monroe D., Silverman P. J., Kuo J. M., Kortan A. R., Thiel F. A., and Weir B. E., J. Vac. Sci. Technol. B10(4), 1807 (1993).
8Hirsch P. B., Howie A, Nicholson R. B., Pashley D. W., and Whelan M. J., Electron Microscopy of Thin Crystals, Butterworths, London (1977).
9Hull R. and Bean J. C., Semiconductors and Semimetals, vol.33, Chapter 1, Pearsall T. P., ed., Academic Press, New York (1991).
10Matthews J. W. and Blakeslee A. E., J. Crystal. Growth 27, 118 (1974).
11Ilegems M., The Technology and Physics of Molecular Beam Epitaxy, Chapter 5, Parker E. H. C., ed. Plenum Press, New York (1985).
12Peng L-M., Du A., Jiang J., and Zhou X. C., submitted to Phil. Mag. Lett.
13Osakabe N., Tanishiro Y., Yagi K., and Honjo G., Surf. Sci., 102, 424 (1981).
14Cowley J. M., Prog. Surface Sci., 21(3), 209 (1986).
15Ghaisas S. V. and Madhukar A., J. Vac. Sci. Technnol. B7(2), 264 (1989).
16Yoffe E. H., Phil. Mag., 5, 161 (1960).
17Shaibani S. J. and Hazzledine P. M., Phil. Mag., A44, 657 (1981).
18Timosbenko S. and Goodier J. N., Theory of Elasticity, McGraw-Hill, New York, (1951).
19Hata M., Isun T.Watanabe A., and Katayama Y., J. Vac. Sci. Technnol. B8(4), 692 (1990).
20Ohta K., Kojima T., and Nakagawa T., J. Crystal Growth 95(1), 71 (1989).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 1 *
Loading metrics...

Abstract views

Total abstract views: 31 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 18th November 2017. This data will be updated every 24 hours.