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Study of the Ion-Acoustic Effect using Focused Ion Beams
Published online by Cambridge University Press: 03 September 2012
Abstract
Acoustic waves induced by an intensity-modulated focused ion beam (FIB) have been measured. The experiments were performed with Ga+ ions of 35 keV at a current of 3 nA and variable chopping frequency up to 10 MHz. The acoustic signals were detected by means of a piezoelectric sensor with integrated pre-amplifier. In the paper the experimental setup and the results of first measurements are presented. Evidence for FIB induced acoustic waves has been found.
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- Copyright © Materials Research Society 1997