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Theory of Hydrogen in Semiconductors

Published online by Cambridge University Press:  10 February 2011

Chris G. van de walle
Chris G. van de walle*
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304; vandewalle@parc.xerox.com
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Abstract

This paper treats the subject of hydrogen in semiconductors from various perspectives. First, a brief historical overview is given. Then, some basic principles governing the interaction between hydrogen and semiconductors are outlined. Finally, specific examples will emphasize the impact of hydrogen on technological applications. While the general treatment applies to interactions of hydrogen with any semiconductor, the applications will focus mainly on hydrogen interacting with silicon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 513: Symposium H – Hydrogen in Semiconductors and Metals , 1998 , 55
Copyright
Copyright © Materials Research Society 1998

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