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Time-Resolved Ellipsometry and Reflectivity Measurements of the Optical Properties of Silicon During Pulsed Excimer Laser Irradiation*

  • G. E. Jellison (a1) and D. H. Lowndes (a1)

Several advances in time-resolved optical measurement techniques have been made, which allow a more detailed determination of the optical properties of silicon immediately before, during, and after pulsed laser irradiation. It is now possible to follow in detail the time-resolved reflectivity signal near the melting threshold; measurements indicate that melting occurs in a spatially inhomogeneous way. The use of time-resolved ellipsometry allowed us to accurately measure the optical properties of the high reflectivity (molten) phase, and of the hot, solid silicon before and after the laser pulse. We obtain n = 3.8, k = 5.2 (±10.1) at λ = 632.8 nm for the high reflectivity phase, in minor disagreement with the published values of Shvarev et al. for liquid silicon. Before and after the high reflectivity phase, the time-resolved ellipsometry measurements are entirely consistent with the known optical properties of crystalline silicon at temperatures up to its melting point.

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Research sponsored by the Division of Materials Sciences, U. S. Department of Energy under contract DE-ACO5-840R21400 with Martin Marietta Energy Systems, Inc.

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1. Auston, D. H., Surko, C. M., Venkatesan, T. N. C., Slusher, R. E., and Golovchenko, J. A., Appl. Phys. Lett. 33, 437 (1978).
2. Lowndes, D. H., Jellison, G. E. Jr., and Wood, R. F., Phys. Rev. B 26, 6747 (1982).
3. Lowndes, D. H., Wood, R. F., and Westbrook, R. D., Appl. Phys. Lett. 43, 258 (1983).
4. Jellison, G. E. Jr., Craven, L. K., and Burke, H. H., private communication.
5. Wood, R. F. and Giles, G. E., Phys. Rev. B 23, 2923 (1982).
6. Hawkins, W. G. and Biegelsen, D. K., Appl. Phys. Lett. 42, 358 (1983); Sipe, J. E., Young, J. F., Preston, J. S., and van Driel, H. M., Phys. Rev. B 27, 1141 (1983); Young, J. F., Preston, J. S., van Driel, H. M., and Sipe, J. E., Phys. Rev. B 27, 1155 (1983); Young, J. F., Sipe, J. E., and van Driel, H. M., Phys. Rev. B 30, 2001 (1984).
7. Combescot, M., Bok, J., and I la Guillame, C. Benoit, Phys. Rev. B 29, (1984).
8. Azzam, R. M. A. and Bashara, N. M.Ellipsometry and Polarized Light” (North Holland, New York, 1977).
9. Shvarev, K. M., Baum, B. A., and Gel'd, P. V., High Temp. 15, 548 (1977).
10. Jellison, G. E. Jr. and Modine, F. A., Appl. Phys. Lett 41, 1980 (1982).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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